10/1/2011	8:03:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	8:03:29 AM	Recipe started at 8:03 AM
10/1/2011	8:03:29 AM	Helium valve closed
10/1/2011	8:03:29 AM	H2 valve closed
10/1/2011	8:03:29 AM	BCl3 valve closed
10/1/2011	8:03:29 AM	PH3 valve closed
10/1/2011	8:03:29 AM	SiCl4 pre valve closed
10/1/2011	8:03:29 AM	SiCl4 post valve closed
10/1/2011	8:03:29 AM	Main Vac valve closed
10/1/2011	8:03:29 AM	Bypass valve closed
10/1/2011	8:03:29 AM	Bubbler valve closed
10/1/2011	8:03:29 AM	Helium MFC set to  0.000000
10/1/2011	8:03:29 AM	H2 MFC set to  0.000000
10/1/2011	8:03:29 AM	BCl3 MFC set to  0.000000
10/1/2011	8:03:29 AM	PHl3 MFC set to  0.000000
10/1/2011	8:03:29 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:03:29 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:03:29 AM	Tube furnace set to 0
10/1/2011	8:03:32 AM	H2 valve closed
10/1/2011	8:03:32 AM	BCl3 valve closed
10/1/2011	8:03:32 AM	PH3 valve closed
10/1/2011	8:03:32 AM	SiCl4 pre valve closed
10/1/2011	8:03:32 AM	SiCl4 post valve closed
10/1/2011	8:03:32 AM	Main Vac valve closed
10/1/2011	8:03:32 AM	Bypass valve closed
10/1/2011	8:03:32 AM	Bubbler valve closed
10/1/2011	8:03:32 AM	Helium valve opened
10/1/2011	8:03:32 AM	Helium MFC set to  500.000000
10/1/2011	8:03:32 AM	H2 MFC set to  0.000000
10/1/2011	8:03:32 AM	BCl3 MFC set to  0.000000
10/1/2011	8:03:32 AM	PHl3 MFC set to  0.000000
10/1/2011	8:03:32 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:03:32 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:03:32 AM	Tube furnace set to 0
10/1/2011	8:04:38 AM	Helium valve closed
10/1/2011	8:04:38 AM	H2 valve closed
10/1/2011	8:04:38 AM	BCl3 valve closed
10/1/2011	8:04:38 AM	PH3 valve closed
10/1/2011	8:04:38 AM	SiCl4 pre valve closed
10/1/2011	8:04:38 AM	SiCl4 post valve closed
10/1/2011	8:04:38 AM	Main Vac valve closed
10/1/2011	8:04:38 AM	Bypass valve closed
10/1/2011	8:04:38 AM	Bubbler valve closed
10/1/2011	8:04:38 AM	Helium MFC set to  0.000000
10/1/2011	8:04:38 AM	H2 MFC set to  0.000000
10/1/2011	8:04:38 AM	BCl3 MFC set to  0.000000
10/1/2011	8:04:38 AM	PHl3 MFC set to  0.000000
10/1/2011	8:04:38 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:04:38 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:04:39 AM	Tube furnace set to 0
10/1/2011	8:04:40 AM	Run finished at 8:04 AM
10/1/2011	8:04:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	8:08:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	8:08:28 AM	Recipe started at 8:08 AM
10/1/2011	8:08:28 AM	Helium valve closed
10/1/2011	8:08:28 AM	H2 valve closed
10/1/2011	8:08:28 AM	BCl3 valve closed
10/1/2011	8:08:28 AM	PH3 valve closed
10/1/2011	8:08:28 AM	SiCl4 pre valve closed
10/1/2011	8:08:28 AM	SiCl4 post valve closed
10/1/2011	8:08:28 AM	Main Vac valve closed
10/1/2011	8:08:28 AM	Bubbler valve closed
10/1/2011	8:08:28 AM	Bypass valve opened
10/1/2011	8:08:28 AM	Helium MFC set to  0.000000
10/1/2011	8:08:28 AM	H2 MFC set to  0.000000
10/1/2011	8:08:28 AM	BCl3 MFC set to  0.000000
10/1/2011	8:08:28 AM	PHl3 MFC set to  0.000000
10/1/2011	8:08:28 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:08:28 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:08:28 AM	Tube furnace set to 0
10/1/2011	8:09:38 AM	Helium valve closed
10/1/2011	8:09:38 AM	H2 valve closed
10/1/2011	8:09:38 AM	BCl3 valve closed
10/1/2011	8:09:38 AM	PH3 valve closed
10/1/2011	8:09:38 AM	SiCl4 pre valve closed
10/1/2011	8:09:38 AM	SiCl4 post valve closed
10/1/2011	8:09:38 AM	Main Vac valve closed
10/1/2011	8:09:38 AM	Bubbler valve closed
10/1/2011	8:09:38 AM	Bypass valve opened
10/1/2011	8:09:38 AM	Helium MFC set to  0.000000
10/1/2011	8:09:38 AM	H2 MFC set to  0.000000
10/1/2011	8:09:38 AM	BCl3 MFC set to  0.000000
10/1/2011	8:09:38 AM	PHl3 MFC set to  0.000000
10/1/2011	8:09:38 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:09:38 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:09:38 AM	Tube furnace set to 0
10/1/2011	8:10:15 AM	Helium valve closed
10/1/2011	8:10:15 AM	H2 valve closed
10/1/2011	8:10:15 AM	BCl3 valve closed
10/1/2011	8:10:15 AM	PH3 valve closed
10/1/2011	8:10:15 AM	SiCl4 pre valve closed
10/1/2011	8:10:15 AM	SiCl4 post valve closed
10/1/2011	8:10:15 AM	Bypass valve closed
10/1/2011	8:10:15 AM	Bubbler valve closed
10/1/2011	8:10:15 AM	Main Vac valve opened
10/1/2011	8:10:15 AM	Helium MFC set to  0.000000
10/1/2011	8:10:15 AM	H2 MFC set to  0.000000
10/1/2011	8:10:15 AM	BCl3 MFC set to  0.000000
10/1/2011	8:10:15 AM	PHl3 MFC set to  0.000000
10/1/2011	8:10:15 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:10:15 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:10:15 AM	Tube furnace set to 0
10/1/2011	8:10:16 AM	Run finished at 8:10 AM
10/1/2011	8:10:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	8:10:39 AM	Recipe started at 8:10 AM
10/1/2011	8:10:39 AM	Helium valve closed
10/1/2011	8:10:39 AM	H2 valve closed
10/1/2011	8:10:39 AM	BCl3 valve closed
10/1/2011	8:10:39 AM	SiCl4 pre valve closed
10/1/2011	8:10:39 AM	SiCl4 post valve closed
10/1/2011	8:10:39 AM	Bypass valve closed
10/1/2011	8:10:39 AM	Bubbler valve closed
10/1/2011	8:10:39 AM	PH3 valve opened
10/1/2011	8:10:39 AM	Main Vac valve opened
10/1/2011	8:10:39 AM	Helium MFC set to  0.000000
10/1/2011	8:10:39 AM	H2 MFC set to  0.000000
10/1/2011	8:10:39 AM	BCl3 MFC set to  0.000000
10/1/2011	8:10:39 AM	PHl3 MFC set to  0.000000
10/1/2011	8:10:39 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:10:39 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:10:39 AM	Tube furnace set to 150
10/1/2011	8:11:09 AM	H2 valve closed
10/1/2011	8:11:09 AM	BCl3 valve closed
10/1/2011	8:11:09 AM	PH3 valve closed
10/1/2011	8:11:09 AM	SiCl4 pre valve closed
10/1/2011	8:11:09 AM	SiCl4 post valve closed
10/1/2011	8:11:09 AM	Bypass valve closed
10/1/2011	8:11:09 AM	Bubbler valve closed
10/1/2011	8:11:09 AM	Helium valve opened
10/1/2011	8:11:09 AM	Main Vac valve opened
10/1/2011	8:11:09 AM	Helium MFC set to  20.000000
10/1/2011	8:11:09 AM	H2 MFC set to  0.000000
10/1/2011	8:11:09 AM	BCl3 MFC set to  0.000000
10/1/2011	8:11:09 AM	PHl3 MFC set to  0.000000
10/1/2011	8:11:09 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:11:09 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:11:09 AM	Tube furnace set to 150
10/1/2011	8:11:39 AM	Helium valve closed
10/1/2011	8:11:39 AM	H2 valve closed
10/1/2011	8:11:39 AM	BCl3 valve closed
10/1/2011	8:11:39 AM	PH3 valve closed
10/1/2011	8:11:39 AM	SiCl4 pre valve closed
10/1/2011	8:11:39 AM	SiCl4 post valve closed
10/1/2011	8:11:39 AM	Bypass valve closed
10/1/2011	8:11:39 AM	Bubbler valve closed
10/1/2011	8:11:39 AM	Main Vac valve opened
10/1/2011	8:11:39 AM	Helium MFC set to  0.000000
10/1/2011	8:11:39 AM	H2 MFC set to  0.000000
10/1/2011	8:11:39 AM	BCl3 MFC set to  0.000000
10/1/2011	8:11:39 AM	PHl3 MFC set to  0.000000
10/1/2011	8:11:39 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:11:39 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:11:40 AM	Tube furnace set to 150
10/1/2011	8:12:10 AM	H2 valve closed
10/1/2011	8:12:10 AM	BCl3 valve closed
10/1/2011	8:12:10 AM	PH3 valve closed
10/1/2011	8:12:10 AM	SiCl4 pre valve closed
10/1/2011	8:12:10 AM	SiCl4 post valve closed
10/1/2011	8:12:10 AM	Bypass valve closed
10/1/2011	8:12:10 AM	Bubbler valve closed
10/1/2011	8:12:10 AM	Helium valve opened
10/1/2011	8:12:10 AM	Main Vac valve opened
10/1/2011	8:12:10 AM	Helium MFC set to  20.000000
10/1/2011	8:12:10 AM	H2 MFC set to  0.000000
10/1/2011	8:12:10 AM	BCl3 MFC set to  0.000000
10/1/2011	8:12:10 AM	PHl3 MFC set to  0.000000
10/1/2011	8:12:10 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:12:10 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:12:10 AM	Tube furnace set to 150
10/1/2011	8:12:40 AM	Helium valve closed
10/1/2011	8:12:40 AM	H2 valve closed
10/1/2011	8:12:40 AM	BCl3 valve closed
10/1/2011	8:12:40 AM	PH3 valve closed
10/1/2011	8:12:40 AM	SiCl4 pre valve closed
10/1/2011	8:12:40 AM	SiCl4 post valve closed
10/1/2011	8:12:40 AM	Bypass valve closed
10/1/2011	8:12:40 AM	Bubbler valve closed
10/1/2011	8:12:40 AM	Main Vac valve opened
10/1/2011	8:12:40 AM	Helium MFC set to  0.000000
10/1/2011	8:12:40 AM	H2 MFC set to  0.000000
10/1/2011	8:12:40 AM	BCl3 MFC set to  0.000000
10/1/2011	8:12:40 AM	PHl3 MFC set to  0.000000
10/1/2011	8:12:40 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:12:40 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:12:40 AM	Tube furnace set to 150
10/1/2011	8:13:10 AM	H2 valve closed
10/1/2011	8:13:10 AM	BCl3 valve closed
10/1/2011	8:13:10 AM	PH3 valve closed
10/1/2011	8:13:10 AM	SiCl4 pre valve closed
10/1/2011	8:13:10 AM	SiCl4 post valve closed
10/1/2011	8:13:10 AM	Bypass valve closed
10/1/2011	8:13:10 AM	Bubbler valve closed
10/1/2011	8:13:10 AM	Helium valve opened
10/1/2011	8:13:10 AM	Main Vac valve opened
10/1/2011	8:13:10 AM	Helium MFC set to  20.000000
10/1/2011	8:13:10 AM	H2 MFC set to  0.000000
10/1/2011	8:13:10 AM	BCl3 MFC set to  0.000000
10/1/2011	8:13:10 AM	PHl3 MFC set to  0.000000
10/1/2011	8:13:10 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:13:10 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:13:10 AM	Tube furnace set to 150
10/1/2011	8:13:40 AM	Helium valve closed
10/1/2011	8:13:40 AM	H2 valve closed
10/1/2011	8:13:40 AM	BCl3 valve closed
10/1/2011	8:13:40 AM	PH3 valve closed
10/1/2011	8:13:40 AM	SiCl4 pre valve closed
10/1/2011	8:13:40 AM	SiCl4 post valve closed
10/1/2011	8:13:40 AM	Bypass valve closed
10/1/2011	8:13:40 AM	Bubbler valve closed
10/1/2011	8:13:40 AM	Main Vac valve opened
10/1/2011	8:13:40 AM	Helium MFC set to  0.000000
10/1/2011	8:13:40 AM	H2 MFC set to  0.000000
10/1/2011	8:13:40 AM	BCl3 MFC set to  0.000000
10/1/2011	8:13:40 AM	PHl3 MFC set to  0.000000
10/1/2011	8:13:40 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:13:40 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:13:40 AM	Tube furnace set to 150
10/1/2011	8:14:10 AM	H2 valve closed
10/1/2011	8:14:10 AM	BCl3 valve closed
10/1/2011	8:14:10 AM	PH3 valve closed
10/1/2011	8:14:10 AM	SiCl4 pre valve closed
10/1/2011	8:14:10 AM	SiCl4 post valve closed
10/1/2011	8:14:10 AM	Bypass valve closed
10/1/2011	8:14:10 AM	Bubbler valve closed
10/1/2011	8:14:10 AM	Helium valve opened
10/1/2011	8:14:10 AM	Main Vac valve opened
10/1/2011	8:14:10 AM	Helium MFC set to  20.000000
10/1/2011	8:14:10 AM	H2 MFC set to  0.000000
10/1/2011	8:14:10 AM	BCl3 MFC set to  0.000000
10/1/2011	8:14:10 AM	PHl3 MFC set to  0.000000
10/1/2011	8:14:10 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:14:10 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:14:11 AM	Tube furnace set to 150
10/1/2011	8:14:41 AM	Helium valve closed
10/1/2011	8:14:41 AM	H2 valve closed
10/1/2011	8:14:41 AM	BCl3 valve closed
10/1/2011	8:14:41 AM	PH3 valve closed
10/1/2011	8:14:41 AM	SiCl4 pre valve closed
10/1/2011	8:14:41 AM	SiCl4 post valve closed
10/1/2011	8:14:41 AM	Bypass valve closed
10/1/2011	8:14:41 AM	Bubbler valve closed
10/1/2011	8:14:41 AM	Main Vac valve opened
10/1/2011	8:14:41 AM	Helium MFC set to  0.000000
10/1/2011	8:14:41 AM	H2 MFC set to  0.000000
10/1/2011	8:14:41 AM	BCl3 MFC set to  0.000000
10/1/2011	8:14:41 AM	PHl3 MFC set to  0.000000
10/1/2011	8:14:41 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:14:41 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:14:41 AM	Tube furnace set to 150
10/1/2011	8:15:11 AM	H2 valve closed
10/1/2011	8:15:11 AM	BCl3 valve closed
10/1/2011	8:15:11 AM	PH3 valve closed
10/1/2011	8:15:11 AM	SiCl4 pre valve closed
10/1/2011	8:15:11 AM	SiCl4 post valve closed
10/1/2011	8:15:11 AM	Bypass valve closed
10/1/2011	8:15:11 AM	Bubbler valve closed
10/1/2011	8:15:11 AM	Helium valve opened
10/1/2011	8:15:11 AM	Main Vac valve opened
10/1/2011	8:15:11 AM	Helium MFC set to  20.000000
10/1/2011	8:15:11 AM	H2 MFC set to  0.000000
10/1/2011	8:15:11 AM	BCl3 MFC set to  0.000000
10/1/2011	8:15:11 AM	PHl3 MFC set to  0.000000
10/1/2011	8:15:11 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:15:11 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:15:11 AM	Tube furnace set to 150
10/1/2011	8:15:41 AM	Helium valve closed
10/1/2011	8:15:41 AM	H2 valve closed
10/1/2011	8:15:41 AM	BCl3 valve closed
10/1/2011	8:15:41 AM	PH3 valve closed
10/1/2011	8:15:41 AM	SiCl4 pre valve closed
10/1/2011	8:15:41 AM	SiCl4 post valve closed
10/1/2011	8:15:41 AM	Bypass valve closed
10/1/2011	8:15:41 AM	Bubbler valve closed
10/1/2011	8:15:41 AM	Main Vac valve opened
10/1/2011	8:15:41 AM	Helium MFC set to  0.000000
10/1/2011	8:15:41 AM	H2 MFC set to  0.000000
10/1/2011	8:15:41 AM	BCl3 MFC set to  0.000000
10/1/2011	8:15:41 AM	PHl3 MFC set to  0.000000
10/1/2011	8:15:41 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:15:41 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:15:41 AM	Tube furnace set to 150
10/1/2011	8:16:11 AM	H2 valve closed
10/1/2011	8:16:11 AM	BCl3 valve closed
10/1/2011	8:16:11 AM	PH3 valve closed
10/1/2011	8:16:11 AM	SiCl4 pre valve closed
10/1/2011	8:16:11 AM	SiCl4 post valve closed
10/1/2011	8:16:11 AM	Bypass valve closed
10/1/2011	8:16:11 AM	Bubbler valve closed
10/1/2011	8:16:11 AM	Helium valve opened
10/1/2011	8:16:11 AM	Main Vac valve opened
10/1/2011	8:16:11 AM	Helium MFC set to  20.000000
10/1/2011	8:16:11 AM	H2 MFC set to  0.000000
10/1/2011	8:16:11 AM	BCl3 MFC set to  0.000000
10/1/2011	8:16:11 AM	PHl3 MFC set to  0.000000
10/1/2011	8:16:11 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:16:11 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:16:11 AM	Tube furnace set to 150
10/1/2011	8:16:41 AM	Helium valve closed
10/1/2011	8:16:41 AM	H2 valve closed
10/1/2011	8:16:41 AM	BCl3 valve closed
10/1/2011	8:16:41 AM	PH3 valve closed
10/1/2011	8:16:41 AM	SiCl4 pre valve closed
10/1/2011	8:16:41 AM	SiCl4 post valve closed
10/1/2011	8:16:41 AM	Bypass valve closed
10/1/2011	8:16:41 AM	Bubbler valve closed
10/1/2011	8:16:41 AM	Main Vac valve opened
10/1/2011	8:16:41 AM	Helium MFC set to  0.000000
10/1/2011	8:16:41 AM	H2 MFC set to  0.000000
10/1/2011	8:16:41 AM	BCl3 MFC set to  0.000000
10/1/2011	8:16:41 AM	PHl3 MFC set to  0.000000
10/1/2011	8:16:41 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:16:41 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:16:42 AM	Tube furnace set to 150
10/1/2011	8:17:12 AM	H2 valve closed
10/1/2011	8:17:12 AM	BCl3 valve closed
10/1/2011	8:17:12 AM	PH3 valve closed
10/1/2011	8:17:12 AM	SiCl4 pre valve closed
10/1/2011	8:17:12 AM	SiCl4 post valve closed
10/1/2011	8:17:12 AM	Bypass valve closed
10/1/2011	8:17:12 AM	Bubbler valve closed
10/1/2011	8:17:12 AM	Helium valve opened
10/1/2011	8:17:12 AM	Main Vac valve opened
10/1/2011	8:17:12 AM	Helium MFC set to  20.000000
10/1/2011	8:17:12 AM	H2 MFC set to  0.000000
10/1/2011	8:17:12 AM	BCl3 MFC set to  0.000000
10/1/2011	8:17:12 AM	PHl3 MFC set to  0.000000
10/1/2011	8:17:12 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:17:12 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:17:12 AM	Tube furnace set to 150
10/1/2011	8:17:42 AM	Helium valve closed
10/1/2011	8:17:42 AM	H2 valve closed
10/1/2011	8:17:42 AM	BCl3 valve closed
10/1/2011	8:17:42 AM	PH3 valve closed
10/1/2011	8:17:42 AM	SiCl4 pre valve closed
10/1/2011	8:17:42 AM	SiCl4 post valve closed
10/1/2011	8:17:42 AM	Bypass valve closed
10/1/2011	8:17:42 AM	Bubbler valve closed
10/1/2011	8:17:42 AM	Main Vac valve opened
10/1/2011	8:17:42 AM	Helium MFC set to  0.000000
10/1/2011	8:17:42 AM	H2 MFC set to  0.000000
10/1/2011	8:17:42 AM	BCl3 MFC set to  0.000000
10/1/2011	8:17:42 AM	PHl3 MFC set to  0.000000
10/1/2011	8:17:42 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:17:42 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:17:42 AM	Tube furnace set to 150
10/1/2011	8:18:12 AM	H2 valve closed
10/1/2011	8:18:12 AM	BCl3 valve closed
10/1/2011	8:18:12 AM	PH3 valve closed
10/1/2011	8:18:12 AM	SiCl4 pre valve closed
10/1/2011	8:18:12 AM	SiCl4 post valve closed
10/1/2011	8:18:12 AM	Bypass valve closed
10/1/2011	8:18:12 AM	Bubbler valve closed
10/1/2011	8:18:12 AM	Helium valve opened
10/1/2011	8:18:12 AM	Main Vac valve opened
10/1/2011	8:18:12 AM	Helium MFC set to  20.000000
10/1/2011	8:18:12 AM	H2 MFC set to  0.000000
10/1/2011	8:18:12 AM	BCl3 MFC set to  0.000000
10/1/2011	8:18:12 AM	PHl3 MFC set to  0.000000
10/1/2011	8:18:12 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:18:12 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:18:12 AM	Tube furnace set to 150
10/1/2011	8:18:42 AM	Helium valve closed
10/1/2011	8:18:42 AM	H2 valve closed
10/1/2011	8:18:42 AM	BCl3 valve closed
10/1/2011	8:18:42 AM	PH3 valve closed
10/1/2011	8:18:42 AM	SiCl4 pre valve closed
10/1/2011	8:18:42 AM	SiCl4 post valve closed
10/1/2011	8:18:42 AM	Bypass valve closed
10/1/2011	8:18:42 AM	Bubbler valve closed
10/1/2011	8:18:42 AM	Main Vac valve opened
10/1/2011	8:18:42 AM	Helium MFC set to  0.000000
10/1/2011	8:18:42 AM	H2 MFC set to  0.000000
10/1/2011	8:18:42 AM	BCl3 MFC set to  0.000000
10/1/2011	8:18:42 AM	PHl3 MFC set to  0.000000
10/1/2011	8:18:42 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:18:42 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:18:42 AM	Tube furnace set to 150
10/1/2011	8:19:12 AM	H2 valve closed
10/1/2011	8:19:12 AM	BCl3 valve closed
10/1/2011	8:19:12 AM	PH3 valve closed
10/1/2011	8:19:12 AM	SiCl4 pre valve closed
10/1/2011	8:19:12 AM	SiCl4 post valve closed
10/1/2011	8:19:12 AM	Bypass valve closed
10/1/2011	8:19:12 AM	Bubbler valve closed
10/1/2011	8:19:12 AM	Helium valve opened
10/1/2011	8:19:13 AM	Main Vac valve opened
10/1/2011	8:19:13 AM	Helium MFC set to  20.000000
10/1/2011	8:19:13 AM	H2 MFC set to  0.000000
10/1/2011	8:19:13 AM	BCl3 MFC set to  0.000000
10/1/2011	8:19:13 AM	PHl3 MFC set to  0.000000
10/1/2011	8:19:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:19:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:19:13 AM	Tube furnace set to 150
10/1/2011	8:19:43 AM	Helium valve closed
10/1/2011	8:19:43 AM	H2 valve closed
10/1/2011	8:19:43 AM	BCl3 valve closed
10/1/2011	8:19:43 AM	PH3 valve closed
10/1/2011	8:19:43 AM	SiCl4 pre valve closed
10/1/2011	8:19:43 AM	SiCl4 post valve closed
10/1/2011	8:19:43 AM	Bypass valve closed
10/1/2011	8:19:43 AM	Bubbler valve closed
10/1/2011	8:19:43 AM	Main Vac valve opened
10/1/2011	8:19:43 AM	Helium MFC set to  0.000000
10/1/2011	8:19:43 AM	H2 MFC set to  0.000000
10/1/2011	8:19:43 AM	BCl3 MFC set to  0.000000
10/1/2011	8:19:43 AM	PHl3 MFC set to  0.000000
10/1/2011	8:19:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:19:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:19:43 AM	Tube furnace set to 150
10/1/2011	8:20:13 AM	H2 valve closed
10/1/2011	8:20:13 AM	BCl3 valve closed
10/1/2011	8:20:13 AM	PH3 valve closed
10/1/2011	8:20:13 AM	SiCl4 pre valve closed
10/1/2011	8:20:13 AM	SiCl4 post valve closed
10/1/2011	8:20:13 AM	Bypass valve closed
10/1/2011	8:20:13 AM	Bubbler valve closed
10/1/2011	8:20:13 AM	Helium valve opened
10/1/2011	8:20:13 AM	Main Vac valve opened
10/1/2011	8:20:13 AM	Helium MFC set to  20.000000
10/1/2011	8:20:13 AM	H2 MFC set to  0.000000
10/1/2011	8:20:13 AM	BCl3 MFC set to  0.000000
10/1/2011	8:20:13 AM	PHl3 MFC set to  0.000000
10/1/2011	8:20:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:20:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:20:13 AM	Tube furnace set to 150
10/1/2011	8:20:43 AM	Helium valve closed
10/1/2011	8:20:43 AM	H2 valve closed
10/1/2011	8:20:43 AM	BCl3 valve closed
10/1/2011	8:20:43 AM	PH3 valve closed
10/1/2011	8:20:43 AM	SiCl4 pre valve closed
10/1/2011	8:20:43 AM	SiCl4 post valve closed
10/1/2011	8:20:43 AM	Bypass valve closed
10/1/2011	8:20:43 AM	Bubbler valve closed
10/1/2011	8:20:43 AM	Main Vac valve opened
10/1/2011	8:20:43 AM	Helium MFC set to  0.000000
10/1/2011	8:20:43 AM	H2 MFC set to  0.000000
10/1/2011	8:20:43 AM	BCl3 MFC set to  0.000000
10/1/2011	8:20:43 AM	PHl3 MFC set to  0.000000
10/1/2011	8:20:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:20:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:20:43 AM	Tube furnace set to 150
10/1/2011	8:20:44 AM	Run finished at 8:20 AM
10/1/2011	8:21:18 AM	Recipe started at 8:21 AM
10/1/2011	8:21:18 AM	Helium valve closed
10/1/2011	8:21:18 AM	H2 valve closed
10/1/2011	8:21:18 AM	BCl3 valve closed
10/1/2011	8:21:18 AM	SiCl4 pre valve closed
10/1/2011	8:21:18 AM	SiCl4 post valve closed
10/1/2011	8:21:18 AM	Bypass valve closed
10/1/2011	8:21:18 AM	Bubbler valve closed
10/1/2011	8:21:18 AM	PH3 valve opened
10/1/2011	8:21:18 AM	Main Vac valve opened
10/1/2011	8:21:18 AM	Helium MFC set to  0.000000
10/1/2011	8:21:18 AM	H2 MFC set to  0.000000
10/1/2011	8:21:18 AM	BCl3 MFC set to  0.000000
10/1/2011	8:21:18 AM	PHl3 MFC set to  0.000000
10/1/2011	8:21:18 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:21:18 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:21:18 AM	Tube furnace set to 150
10/1/2011	8:21:48 AM	H2 valve closed
10/1/2011	8:21:48 AM	BCl3 valve closed
10/1/2011	8:21:48 AM	PH3 valve closed
10/1/2011	8:21:48 AM	SiCl4 pre valve closed
10/1/2011	8:21:48 AM	SiCl4 post valve closed
10/1/2011	8:21:48 AM	Bypass valve closed
10/1/2011	8:21:48 AM	Bubbler valve closed
10/1/2011	8:21:48 AM	Helium valve opened
10/1/2011	8:21:48 AM	Main Vac valve opened
10/1/2011	8:21:48 AM	Helium MFC set to  20.000000
10/1/2011	8:21:48 AM	H2 MFC set to  0.000000
10/1/2011	8:21:48 AM	BCl3 MFC set to  0.000000
10/1/2011	8:21:48 AM	PHl3 MFC set to  0.000000
10/1/2011	8:21:48 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:21:48 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:21:48 AM	Tube furnace set to 150
10/1/2011	8:22:18 AM	Helium valve closed
10/1/2011	8:22:18 AM	H2 valve closed
10/1/2011	8:22:18 AM	BCl3 valve closed
10/1/2011	8:22:18 AM	PH3 valve closed
10/1/2011	8:22:18 AM	SiCl4 pre valve closed
10/1/2011	8:22:18 AM	SiCl4 post valve closed
10/1/2011	8:22:18 AM	Bypass valve closed
10/1/2011	8:22:18 AM	Bubbler valve closed
10/1/2011	8:22:18 AM	Main Vac valve opened
10/1/2011	8:22:18 AM	Helium MFC set to  0.000000
10/1/2011	8:22:18 AM	H2 MFC set to  0.000000
10/1/2011	8:22:18 AM	BCl3 MFC set to  0.000000
10/1/2011	8:22:18 AM	PHl3 MFC set to  0.000000
10/1/2011	8:22:18 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:22:18 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:22:18 AM	Tube furnace set to 150
10/1/2011	8:22:48 AM	H2 valve closed
10/1/2011	8:22:48 AM	BCl3 valve closed
10/1/2011	8:22:48 AM	PH3 valve closed
10/1/2011	8:22:48 AM	SiCl4 pre valve closed
10/1/2011	8:22:48 AM	SiCl4 post valve closed
10/1/2011	8:22:48 AM	Bypass valve closed
10/1/2011	8:22:48 AM	Bubbler valve closed
10/1/2011	8:22:48 AM	Helium valve opened
10/1/2011	8:22:48 AM	Main Vac valve opened
10/1/2011	8:22:48 AM	Helium MFC set to  20.000000
10/1/2011	8:22:48 AM	H2 MFC set to  0.000000
10/1/2011	8:22:48 AM	BCl3 MFC set to  0.000000
10/1/2011	8:22:48 AM	PHl3 MFC set to  0.000000
10/1/2011	8:22:48 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:22:48 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:22:49 AM	Tube furnace set to 150
10/1/2011	8:23:19 AM	Helium valve closed
10/1/2011	8:23:19 AM	H2 valve closed
10/1/2011	8:23:19 AM	BCl3 valve closed
10/1/2011	8:23:19 AM	PH3 valve closed
10/1/2011	8:23:19 AM	SiCl4 pre valve closed
10/1/2011	8:23:19 AM	SiCl4 post valve closed
10/1/2011	8:23:19 AM	Bypass valve closed
10/1/2011	8:23:19 AM	Bubbler valve closed
10/1/2011	8:23:19 AM	Main Vac valve opened
10/1/2011	8:23:19 AM	Helium MFC set to  0.000000
10/1/2011	8:23:19 AM	H2 MFC set to  0.000000
10/1/2011	8:23:19 AM	BCl3 MFC set to  0.000000
10/1/2011	8:23:19 AM	PHl3 MFC set to  0.000000
10/1/2011	8:23:19 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:23:19 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:23:19 AM	Tube furnace set to 150
10/1/2011	8:23:49 AM	H2 valve closed
10/1/2011	8:23:49 AM	BCl3 valve closed
10/1/2011	8:23:49 AM	PH3 valve closed
10/1/2011	8:23:49 AM	SiCl4 pre valve closed
10/1/2011	8:23:49 AM	SiCl4 post valve closed
10/1/2011	8:23:49 AM	Bypass valve closed
10/1/2011	8:23:49 AM	Bubbler valve closed
10/1/2011	8:23:49 AM	Helium valve opened
10/1/2011	8:23:49 AM	Main Vac valve opened
10/1/2011	8:23:49 AM	Helium MFC set to  20.000000
10/1/2011	8:23:49 AM	H2 MFC set to  0.000000
10/1/2011	8:23:49 AM	BCl3 MFC set to  0.000000
10/1/2011	8:23:49 AM	PHl3 MFC set to  0.000000
10/1/2011	8:23:49 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:23:49 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:23:49 AM	Tube furnace set to 150
10/1/2011	8:24:19 AM	Helium valve closed
10/1/2011	8:24:19 AM	H2 valve closed
10/1/2011	8:24:19 AM	BCl3 valve closed
10/1/2011	8:24:19 AM	PH3 valve closed
10/1/2011	8:24:19 AM	SiCl4 pre valve closed
10/1/2011	8:24:19 AM	SiCl4 post valve closed
10/1/2011	8:24:19 AM	Bypass valve closed
10/1/2011	8:24:19 AM	Bubbler valve closed
10/1/2011	8:24:19 AM	Main Vac valve opened
10/1/2011	8:24:19 AM	Helium MFC set to  0.000000
10/1/2011	8:24:19 AM	H2 MFC set to  0.000000
10/1/2011	8:24:19 AM	BCl3 MFC set to  0.000000
10/1/2011	8:24:19 AM	PHl3 MFC set to  0.000000
10/1/2011	8:24:19 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:24:19 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:24:19 AM	Tube furnace set to 150
10/1/2011	8:24:49 AM	H2 valve closed
10/1/2011	8:24:49 AM	BCl3 valve closed
10/1/2011	8:24:49 AM	PH3 valve closed
10/1/2011	8:24:49 AM	SiCl4 pre valve closed
10/1/2011	8:24:49 AM	SiCl4 post valve closed
10/1/2011	8:24:49 AM	Bypass valve closed
10/1/2011	8:24:49 AM	Bubbler valve closed
10/1/2011	8:24:49 AM	Helium valve opened
10/1/2011	8:24:49 AM	Main Vac valve opened
10/1/2011	8:24:49 AM	Helium MFC set to  20.000000
10/1/2011	8:24:49 AM	H2 MFC set to  0.000000
10/1/2011	8:24:49 AM	BCl3 MFC set to  0.000000
10/1/2011	8:24:49 AM	PHl3 MFC set to  0.000000
10/1/2011	8:24:49 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:24:49 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:24:49 AM	Tube furnace set to 150
10/1/2011	8:25:19 AM	Helium valve closed
10/1/2011	8:25:19 AM	H2 valve closed
10/1/2011	8:25:19 AM	BCl3 valve closed
10/1/2011	8:25:19 AM	PH3 valve closed
10/1/2011	8:25:19 AM	SiCl4 pre valve closed
10/1/2011	8:25:19 AM	SiCl4 post valve closed
10/1/2011	8:25:19 AM	Bypass valve closed
10/1/2011	8:25:19 AM	Bubbler valve closed
10/1/2011	8:25:19 AM	Main Vac valve opened
10/1/2011	8:25:19 AM	Helium MFC set to  0.000000
10/1/2011	8:25:19 AM	H2 MFC set to  0.000000
10/1/2011	8:25:19 AM	BCl3 MFC set to  0.000000
10/1/2011	8:25:19 AM	PHl3 MFC set to  0.000000
10/1/2011	8:25:19 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:25:19 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:25:20 AM	Tube furnace set to 150
10/1/2011	8:25:50 AM	H2 valve closed
10/1/2011	8:25:50 AM	BCl3 valve closed
10/1/2011	8:25:50 AM	PH3 valve closed
10/1/2011	8:25:50 AM	SiCl4 pre valve closed
10/1/2011	8:25:50 AM	SiCl4 post valve closed
10/1/2011	8:25:50 AM	Bypass valve closed
10/1/2011	8:25:50 AM	Bubbler valve closed
10/1/2011	8:25:50 AM	Helium valve opened
10/1/2011	8:25:50 AM	Main Vac valve opened
10/1/2011	8:25:50 AM	Helium MFC set to  20.000000
10/1/2011	8:25:50 AM	H2 MFC set to  0.000000
10/1/2011	8:25:50 AM	BCl3 MFC set to  0.000000
10/1/2011	8:25:50 AM	PHl3 MFC set to  0.000000
10/1/2011	8:25:50 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:25:50 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:25:50 AM	Tube furnace set to 150
10/1/2011	8:26:20 AM	Helium valve closed
10/1/2011	8:26:20 AM	H2 valve closed
10/1/2011	8:26:20 AM	BCl3 valve closed
10/1/2011	8:26:20 AM	PH3 valve closed
10/1/2011	8:26:20 AM	SiCl4 pre valve closed
10/1/2011	8:26:20 AM	SiCl4 post valve closed
10/1/2011	8:26:20 AM	Bypass valve closed
10/1/2011	8:26:20 AM	Bubbler valve closed
10/1/2011	8:26:20 AM	Main Vac valve opened
10/1/2011	8:26:20 AM	Helium MFC set to  0.000000
10/1/2011	8:26:20 AM	H2 MFC set to  0.000000
10/1/2011	8:26:20 AM	BCl3 MFC set to  0.000000
10/1/2011	8:26:20 AM	PHl3 MFC set to  0.000000
10/1/2011	8:26:20 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:26:20 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:26:20 AM	Tube furnace set to 150
10/1/2011	8:26:50 AM	H2 valve closed
10/1/2011	8:26:50 AM	BCl3 valve closed
10/1/2011	8:26:50 AM	PH3 valve closed
10/1/2011	8:26:50 AM	SiCl4 pre valve closed
10/1/2011	8:26:50 AM	SiCl4 post valve closed
10/1/2011	8:26:50 AM	Bypass valve closed
10/1/2011	8:26:50 AM	Bubbler valve closed
10/1/2011	8:26:50 AM	Helium valve opened
10/1/2011	8:26:50 AM	Main Vac valve opened
10/1/2011	8:26:50 AM	Helium MFC set to  20.000000
10/1/2011	8:26:50 AM	H2 MFC set to  0.000000
10/1/2011	8:26:50 AM	BCl3 MFC set to  0.000000
10/1/2011	8:26:50 AM	PHl3 MFC set to  0.000000
10/1/2011	8:26:50 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:26:50 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:26:50 AM	Tube furnace set to 150
10/1/2011	8:27:20 AM	Helium valve closed
10/1/2011	8:27:20 AM	H2 valve closed
10/1/2011	8:27:20 AM	BCl3 valve closed
10/1/2011	8:27:20 AM	PH3 valve closed
10/1/2011	8:27:20 AM	SiCl4 pre valve closed
10/1/2011	8:27:20 AM	SiCl4 post valve closed
10/1/2011	8:27:20 AM	Bypass valve closed
10/1/2011	8:27:20 AM	Bubbler valve closed
10/1/2011	8:27:20 AM	Main Vac valve opened
10/1/2011	8:27:20 AM	Helium MFC set to  0.000000
10/1/2011	8:27:20 AM	H2 MFC set to  0.000000
10/1/2011	8:27:20 AM	BCl3 MFC set to  0.000000
10/1/2011	8:27:20 AM	PHl3 MFC set to  0.000000
10/1/2011	8:27:20 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:27:20 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:27:20 AM	Tube furnace set to 150
10/1/2011	8:27:50 AM	H2 valve closed
10/1/2011	8:27:50 AM	BCl3 valve closed
10/1/2011	8:27:50 AM	PH3 valve closed
10/1/2011	8:27:50 AM	SiCl4 pre valve closed
10/1/2011	8:27:50 AM	SiCl4 post valve closed
10/1/2011	8:27:50 AM	Bypass valve closed
10/1/2011	8:27:50 AM	Bubbler valve closed
10/1/2011	8:27:50 AM	Helium valve opened
10/1/2011	8:27:50 AM	Main Vac valve opened
10/1/2011	8:27:50 AM	Helium MFC set to  20.000000
10/1/2011	8:27:50 AM	H2 MFC set to  0.000000
10/1/2011	8:27:50 AM	BCl3 MFC set to  0.000000
10/1/2011	8:27:50 AM	PHl3 MFC set to  0.000000
10/1/2011	8:27:50 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:27:50 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:27:51 AM	Tube furnace set to 150
10/1/2011	8:28:21 AM	Helium valve closed
10/1/2011	8:28:21 AM	H2 valve closed
10/1/2011	8:28:21 AM	BCl3 valve closed
10/1/2011	8:28:21 AM	PH3 valve closed
10/1/2011	8:28:21 AM	SiCl4 pre valve closed
10/1/2011	8:28:21 AM	SiCl4 post valve closed
10/1/2011	8:28:21 AM	Bypass valve closed
10/1/2011	8:28:21 AM	Bubbler valve closed
10/1/2011	8:28:21 AM	Main Vac valve opened
10/1/2011	8:28:21 AM	Helium MFC set to  0.000000
10/1/2011	8:28:21 AM	H2 MFC set to  0.000000
10/1/2011	8:28:21 AM	BCl3 MFC set to  0.000000
10/1/2011	8:28:21 AM	PHl3 MFC set to  0.000000
10/1/2011	8:28:21 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:28:21 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:28:21 AM	Tube furnace set to 150
10/1/2011	8:28:51 AM	H2 valve closed
10/1/2011	8:28:51 AM	BCl3 valve closed
10/1/2011	8:28:51 AM	PH3 valve closed
10/1/2011	8:28:51 AM	SiCl4 pre valve closed
10/1/2011	8:28:51 AM	SiCl4 post valve closed
10/1/2011	8:28:51 AM	Bypass valve closed
10/1/2011	8:28:51 AM	Bubbler valve closed
10/1/2011	8:28:51 AM	Helium valve opened
10/1/2011	8:28:51 AM	Main Vac valve opened
10/1/2011	8:28:51 AM	Helium MFC set to  20.000000
10/1/2011	8:28:51 AM	H2 MFC set to  0.000000
10/1/2011	8:28:51 AM	BCl3 MFC set to  0.000000
10/1/2011	8:28:51 AM	PHl3 MFC set to  0.000000
10/1/2011	8:28:51 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:28:51 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:28:51 AM	Tube furnace set to 150
10/1/2011	8:29:21 AM	Helium valve closed
10/1/2011	8:29:21 AM	H2 valve closed
10/1/2011	8:29:21 AM	BCl3 valve closed
10/1/2011	8:29:21 AM	PH3 valve closed
10/1/2011	8:29:21 AM	SiCl4 pre valve closed
10/1/2011	8:29:21 AM	SiCl4 post valve closed
10/1/2011	8:29:21 AM	Bypass valve closed
10/1/2011	8:29:21 AM	Bubbler valve closed
10/1/2011	8:29:21 AM	Main Vac valve opened
10/1/2011	8:29:21 AM	Helium MFC set to  0.000000
10/1/2011	8:29:21 AM	H2 MFC set to  0.000000
10/1/2011	8:29:21 AM	BCl3 MFC set to  0.000000
10/1/2011	8:29:21 AM	PHl3 MFC set to  0.000000
10/1/2011	8:29:21 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:29:21 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:29:21 AM	Tube furnace set to 150
10/1/2011	8:29:51 AM	H2 valve closed
10/1/2011	8:29:51 AM	BCl3 valve closed
10/1/2011	8:29:51 AM	PH3 valve closed
10/1/2011	8:29:51 AM	SiCl4 pre valve closed
10/1/2011	8:29:51 AM	SiCl4 post valve closed
10/1/2011	8:29:51 AM	Bypass valve closed
10/1/2011	8:29:51 AM	Bubbler valve closed
10/1/2011	8:29:51 AM	Helium valve opened
10/1/2011	8:29:51 AM	Main Vac valve opened
10/1/2011	8:29:51 AM	Helium MFC set to  20.000000
10/1/2011	8:29:51 AM	H2 MFC set to  0.000000
10/1/2011	8:29:51 AM	BCl3 MFC set to  0.000000
10/1/2011	8:29:51 AM	PHl3 MFC set to  0.000000
10/1/2011	8:29:51 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:29:51 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:29:51 AM	Tube furnace set to 150
10/1/2011	8:30:21 AM	Helium valve closed
10/1/2011	8:30:21 AM	H2 valve closed
10/1/2011	8:30:21 AM	BCl3 valve closed
10/1/2011	8:30:21 AM	PH3 valve closed
10/1/2011	8:30:21 AM	SiCl4 pre valve closed
10/1/2011	8:30:21 AM	SiCl4 post valve closed
10/1/2011	8:30:21 AM	Bypass valve closed
10/1/2011	8:30:21 AM	Bubbler valve closed
10/1/2011	8:30:21 AM	Main Vac valve opened
10/1/2011	8:30:21 AM	Helium MFC set to  0.000000
10/1/2011	8:30:21 AM	H2 MFC set to  0.000000
10/1/2011	8:30:21 AM	BCl3 MFC set to  0.000000
10/1/2011	8:30:21 AM	PHl3 MFC set to  0.000000
10/1/2011	8:30:21 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:30:21 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:30:22 AM	Tube furnace set to 150
10/1/2011	8:30:52 AM	H2 valve closed
10/1/2011	8:30:52 AM	BCl3 valve closed
10/1/2011	8:30:52 AM	PH3 valve closed
10/1/2011	8:30:52 AM	SiCl4 pre valve closed
10/1/2011	8:30:52 AM	SiCl4 post valve closed
10/1/2011	8:30:52 AM	Bypass valve closed
10/1/2011	8:30:52 AM	Bubbler valve closed
10/1/2011	8:30:52 AM	Helium valve opened
10/1/2011	8:30:52 AM	Main Vac valve opened
10/1/2011	8:30:52 AM	Helium MFC set to  20.000000
10/1/2011	8:30:52 AM	H2 MFC set to  0.000000
10/1/2011	8:30:52 AM	BCl3 MFC set to  0.000000
10/1/2011	8:30:52 AM	PHl3 MFC set to  0.000000
10/1/2011	8:30:52 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:30:52 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:30:52 AM	Tube furnace set to 150
10/1/2011	8:31:22 AM	Helium valve closed
10/1/2011	8:31:22 AM	H2 valve closed
10/1/2011	8:31:22 AM	BCl3 valve closed
10/1/2011	8:31:22 AM	PH3 valve closed
10/1/2011	8:31:22 AM	SiCl4 pre valve closed
10/1/2011	8:31:22 AM	SiCl4 post valve closed
10/1/2011	8:31:22 AM	Bypass valve closed
10/1/2011	8:31:22 AM	Bubbler valve closed
10/1/2011	8:31:22 AM	Main Vac valve opened
10/1/2011	8:31:22 AM	Helium MFC set to  0.000000
10/1/2011	8:31:22 AM	H2 MFC set to  0.000000
10/1/2011	8:31:22 AM	BCl3 MFC set to  0.000000
10/1/2011	8:31:22 AM	PHl3 MFC set to  0.000000
10/1/2011	8:31:22 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:31:22 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:31:22 AM	Tube furnace set to 150
10/1/2011	8:31:23 AM	Run finished at 8:31 AM
10/1/2011	8:31:51 AM	Tube furnace set to 0
10/1/2011	8:32:25 AM	Recipe started at 8:32 AM
10/1/2011	8:32:25 AM	Helium valve closed
10/1/2011	8:32:25 AM	H2 valve closed
10/1/2011	8:32:25 AM	BCl3 valve closed
10/1/2011	8:32:25 AM	SiCl4 pre valve closed
10/1/2011	8:32:25 AM	SiCl4 post valve closed
10/1/2011	8:32:25 AM	Bypass valve closed
10/1/2011	8:32:25 AM	Bubbler valve closed
10/1/2011	8:32:25 AM	PH3 valve opened
10/1/2011	8:32:25 AM	Main Vac valve opened
10/1/2011	8:32:25 AM	Helium MFC set to  0.000000
10/1/2011	8:32:25 AM	H2 MFC set to  0.000000
10/1/2011	8:32:25 AM	BCl3 MFC set to  0.000000
10/1/2011	8:32:25 AM	PHl3 MFC set to  0.000000
10/1/2011	8:32:25 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:32:25 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:32:25 AM	Tube furnace set to 150
10/1/2011	8:32:55 AM	H2 valve closed
10/1/2011	8:32:55 AM	BCl3 valve closed
10/1/2011	8:32:55 AM	PH3 valve closed
10/1/2011	8:32:55 AM	SiCl4 pre valve closed
10/1/2011	8:32:55 AM	SiCl4 post valve closed
10/1/2011	8:32:55 AM	Bypass valve closed
10/1/2011	8:32:55 AM	Bubbler valve closed
10/1/2011	8:32:55 AM	Helium valve opened
10/1/2011	8:32:55 AM	Main Vac valve opened
10/1/2011	8:32:55 AM	Helium MFC set to  20.000000
10/1/2011	8:32:55 AM	H2 MFC set to  0.000000
10/1/2011	8:32:55 AM	BCl3 MFC set to  0.000000
10/1/2011	8:32:55 AM	PHl3 MFC set to  0.000000
10/1/2011	8:32:55 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:32:55 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:32:55 AM	Tube furnace set to 150
10/1/2011	8:33:25 AM	Helium valve closed
10/1/2011	8:33:25 AM	H2 valve closed
10/1/2011	8:33:25 AM	BCl3 valve closed
10/1/2011	8:33:25 AM	PH3 valve closed
10/1/2011	8:33:25 AM	SiCl4 pre valve closed
10/1/2011	8:33:25 AM	SiCl4 post valve closed
10/1/2011	8:33:25 AM	Bypass valve closed
10/1/2011	8:33:25 AM	Bubbler valve closed
10/1/2011	8:33:25 AM	Main Vac valve opened
10/1/2011	8:33:25 AM	Helium MFC set to  0.000000
10/1/2011	8:33:25 AM	H2 MFC set to  0.000000
10/1/2011	8:33:25 AM	BCl3 MFC set to  0.000000
10/1/2011	8:33:25 AM	PHl3 MFC set to  0.000000
10/1/2011	8:33:25 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:33:25 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:33:26 AM	Tube furnace set to 150
10/1/2011	8:33:56 AM	H2 valve closed
10/1/2011	8:33:56 AM	BCl3 valve closed
10/1/2011	8:33:56 AM	PH3 valve closed
10/1/2011	8:33:56 AM	SiCl4 pre valve closed
10/1/2011	8:33:56 AM	SiCl4 post valve closed
10/1/2011	8:33:56 AM	Bypass valve closed
10/1/2011	8:33:56 AM	Bubbler valve closed
10/1/2011	8:33:56 AM	Helium valve opened
10/1/2011	8:33:56 AM	Main Vac valve opened
10/1/2011	8:33:56 AM	Helium MFC set to  20.000000
10/1/2011	8:33:56 AM	H2 MFC set to  0.000000
10/1/2011	8:33:56 AM	BCl3 MFC set to  0.000000
10/1/2011	8:33:56 AM	PHl3 MFC set to  0.000000
10/1/2011	8:33:56 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:33:56 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:33:56 AM	Tube furnace set to 150
10/1/2011	8:34:26 AM	Helium valve closed
10/1/2011	8:34:26 AM	H2 valve closed
10/1/2011	8:34:26 AM	BCl3 valve closed
10/1/2011	8:34:26 AM	PH3 valve closed
10/1/2011	8:34:26 AM	SiCl4 pre valve closed
10/1/2011	8:34:26 AM	SiCl4 post valve closed
10/1/2011	8:34:26 AM	Bypass valve closed
10/1/2011	8:34:26 AM	Bubbler valve closed
10/1/2011	8:34:26 AM	Main Vac valve opened
10/1/2011	8:34:26 AM	Helium MFC set to  0.000000
10/1/2011	8:34:26 AM	H2 MFC set to  0.000000
10/1/2011	8:34:26 AM	BCl3 MFC set to  0.000000
10/1/2011	8:34:26 AM	PHl3 MFC set to  0.000000
10/1/2011	8:34:26 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:34:26 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:34:26 AM	Tube furnace set to 150
10/1/2011	8:34:56 AM	H2 valve closed
10/1/2011	8:34:56 AM	BCl3 valve closed
10/1/2011	8:34:56 AM	PH3 valve closed
10/1/2011	8:34:56 AM	SiCl4 pre valve closed
10/1/2011	8:34:56 AM	SiCl4 post valve closed
10/1/2011	8:34:56 AM	Bypass valve closed
10/1/2011	8:34:56 AM	Bubbler valve closed
10/1/2011	8:34:56 AM	Helium valve opened
10/1/2011	8:34:56 AM	Main Vac valve opened
10/1/2011	8:34:56 AM	Helium MFC set to  20.000000
10/1/2011	8:34:56 AM	H2 MFC set to  0.000000
10/1/2011	8:34:56 AM	BCl3 MFC set to  0.000000
10/1/2011	8:34:56 AM	PHl3 MFC set to  0.000000
10/1/2011	8:34:56 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:34:56 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:34:56 AM	Tube furnace set to 150
10/1/2011	8:35:26 AM	Helium valve closed
10/1/2011	8:35:26 AM	H2 valve closed
10/1/2011	8:35:26 AM	BCl3 valve closed
10/1/2011	8:35:26 AM	PH3 valve closed
10/1/2011	8:35:26 AM	SiCl4 pre valve closed
10/1/2011	8:35:26 AM	SiCl4 post valve closed
10/1/2011	8:35:26 AM	Bypass valve closed
10/1/2011	8:35:26 AM	Bubbler valve closed
10/1/2011	8:35:26 AM	Main Vac valve opened
10/1/2011	8:35:26 AM	Helium MFC set to  0.000000
10/1/2011	8:35:26 AM	H2 MFC set to  0.000000
10/1/2011	8:35:26 AM	BCl3 MFC set to  0.000000
10/1/2011	8:35:26 AM	PHl3 MFC set to  0.000000
10/1/2011	8:35:26 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:35:26 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:35:26 AM	Tube furnace set to 150
10/1/2011	8:35:56 AM	H2 valve closed
10/1/2011	8:35:56 AM	BCl3 valve closed
10/1/2011	8:35:56 AM	PH3 valve closed
10/1/2011	8:35:56 AM	SiCl4 pre valve closed
10/1/2011	8:35:56 AM	SiCl4 post valve closed
10/1/2011	8:35:56 AM	Bypass valve closed
10/1/2011	8:35:56 AM	Bubbler valve closed
10/1/2011	8:35:56 AM	Helium valve opened
10/1/2011	8:35:56 AM	Main Vac valve opened
10/1/2011	8:35:56 AM	Helium MFC set to  20.000000
10/1/2011	8:35:56 AM	H2 MFC set to  0.000000
10/1/2011	8:35:56 AM	BCl3 MFC set to  0.000000
10/1/2011	8:35:56 AM	PHl3 MFC set to  0.000000
10/1/2011	8:35:56 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:35:56 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:35:57 AM	Tube furnace set to 150
10/1/2011	8:36:27 AM	Helium valve closed
10/1/2011	8:36:27 AM	H2 valve closed
10/1/2011	8:36:27 AM	BCl3 valve closed
10/1/2011	8:36:27 AM	PH3 valve closed
10/1/2011	8:36:27 AM	SiCl4 pre valve closed
10/1/2011	8:36:27 AM	SiCl4 post valve closed
10/1/2011	8:36:27 AM	Bypass valve closed
10/1/2011	8:36:27 AM	Bubbler valve closed
10/1/2011	8:36:27 AM	Main Vac valve opened
10/1/2011	8:36:27 AM	Helium MFC set to  0.000000
10/1/2011	8:36:27 AM	H2 MFC set to  0.000000
10/1/2011	8:36:27 AM	BCl3 MFC set to  0.000000
10/1/2011	8:36:27 AM	PHl3 MFC set to  0.000000
10/1/2011	8:36:27 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:36:27 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:36:27 AM	Tube furnace set to 150
10/1/2011	8:36:57 AM	H2 valve closed
10/1/2011	8:36:57 AM	BCl3 valve closed
10/1/2011	8:36:57 AM	PH3 valve closed
10/1/2011	8:36:57 AM	SiCl4 pre valve closed
10/1/2011	8:36:57 AM	SiCl4 post valve closed
10/1/2011	8:36:57 AM	Bypass valve closed
10/1/2011	8:36:57 AM	Bubbler valve closed
10/1/2011	8:36:57 AM	Helium valve opened
10/1/2011	8:36:57 AM	Main Vac valve opened
10/1/2011	8:36:57 AM	Helium MFC set to  20.000000
10/1/2011	8:36:57 AM	H2 MFC set to  0.000000
10/1/2011	8:36:57 AM	BCl3 MFC set to  0.000000
10/1/2011	8:36:57 AM	PHl3 MFC set to  0.000000
10/1/2011	8:36:57 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:36:57 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:36:57 AM	Tube furnace set to 150
10/1/2011	8:37:27 AM	Helium valve closed
10/1/2011	8:37:27 AM	H2 valve closed
10/1/2011	8:37:27 AM	BCl3 valve closed
10/1/2011	8:37:27 AM	PH3 valve closed
10/1/2011	8:37:27 AM	SiCl4 pre valve closed
10/1/2011	8:37:27 AM	SiCl4 post valve closed
10/1/2011	8:37:27 AM	Bypass valve closed
10/1/2011	8:37:27 AM	Bubbler valve closed
10/1/2011	8:37:27 AM	Main Vac valve opened
10/1/2011	8:37:27 AM	Helium MFC set to  0.000000
10/1/2011	8:37:27 AM	H2 MFC set to  0.000000
10/1/2011	8:37:27 AM	BCl3 MFC set to  0.000000
10/1/2011	8:37:27 AM	PHl3 MFC set to  0.000000
10/1/2011	8:37:27 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:37:27 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:37:27 AM	Tube furnace set to 150
10/1/2011	8:37:57 AM	H2 valve closed
10/1/2011	8:37:57 AM	BCl3 valve closed
10/1/2011	8:37:57 AM	PH3 valve closed
10/1/2011	8:37:57 AM	SiCl4 pre valve closed
10/1/2011	8:37:57 AM	SiCl4 post valve closed
10/1/2011	8:37:57 AM	Bypass valve closed
10/1/2011	8:37:57 AM	Bubbler valve closed
10/1/2011	8:37:57 AM	Helium valve opened
10/1/2011	8:37:57 AM	Main Vac valve opened
10/1/2011	8:37:57 AM	Helium MFC set to  20.000000
10/1/2011	8:37:57 AM	H2 MFC set to  0.000000
10/1/2011	8:37:57 AM	BCl3 MFC set to  0.000000
10/1/2011	8:37:57 AM	PHl3 MFC set to  0.000000
10/1/2011	8:37:57 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:37:57 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:37:57 AM	Tube furnace set to 150
10/1/2011	8:38:27 AM	Helium valve closed
10/1/2011	8:38:27 AM	H2 valve closed
10/1/2011	8:38:27 AM	BCl3 valve closed
10/1/2011	8:38:28 AM	PH3 valve closed
10/1/2011	8:38:28 AM	SiCl4 pre valve closed
10/1/2011	8:38:28 AM	SiCl4 post valve closed
10/1/2011	8:38:28 AM	Bypass valve closed
10/1/2011	8:38:28 AM	Bubbler valve closed
10/1/2011	8:38:28 AM	Main Vac valve opened
10/1/2011	8:38:28 AM	Helium MFC set to  0.000000
10/1/2011	8:38:28 AM	H2 MFC set to  0.000000
10/1/2011	8:38:28 AM	BCl3 MFC set to  0.000000
10/1/2011	8:38:28 AM	PHl3 MFC set to  0.000000
10/1/2011	8:38:28 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:38:28 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:38:28 AM	Tube furnace set to 150
10/1/2011	8:38:58 AM	H2 valve closed
10/1/2011	8:38:58 AM	BCl3 valve closed
10/1/2011	8:38:58 AM	PH3 valve closed
10/1/2011	8:38:58 AM	SiCl4 pre valve closed
10/1/2011	8:38:58 AM	SiCl4 post valve closed
10/1/2011	8:38:58 AM	Bypass valve closed
10/1/2011	8:38:58 AM	Bubbler valve closed
10/1/2011	8:38:58 AM	Helium valve opened
10/1/2011	8:38:58 AM	Main Vac valve opened
10/1/2011	8:38:58 AM	Helium MFC set to  20.000000
10/1/2011	8:38:58 AM	H2 MFC set to  0.000000
10/1/2011	8:38:58 AM	BCl3 MFC set to  0.000000
10/1/2011	8:38:58 AM	PHl3 MFC set to  0.000000
10/1/2011	8:38:58 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:38:58 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:38:58 AM	Tube furnace set to 150
10/1/2011	8:39:28 AM	Helium valve closed
10/1/2011	8:39:28 AM	H2 valve closed
10/1/2011	8:39:28 AM	BCl3 valve closed
10/1/2011	8:39:28 AM	PH3 valve closed
10/1/2011	8:39:28 AM	SiCl4 pre valve closed
10/1/2011	8:39:28 AM	SiCl4 post valve closed
10/1/2011	8:39:28 AM	Bypass valve closed
10/1/2011	8:39:28 AM	Bubbler valve closed
10/1/2011	8:39:28 AM	Main Vac valve opened
10/1/2011	8:39:28 AM	Helium MFC set to  0.000000
10/1/2011	8:39:28 AM	H2 MFC set to  0.000000
10/1/2011	8:39:28 AM	BCl3 MFC set to  0.000000
10/1/2011	8:39:28 AM	PHl3 MFC set to  0.000000
10/1/2011	8:39:28 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:39:28 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:39:28 AM	Tube furnace set to 150
10/1/2011	8:39:58 AM	H2 valve closed
10/1/2011	8:39:58 AM	BCl3 valve closed
10/1/2011	8:39:58 AM	PH3 valve closed
10/1/2011	8:39:58 AM	SiCl4 pre valve closed
10/1/2011	8:39:58 AM	SiCl4 post valve closed
10/1/2011	8:39:58 AM	Bypass valve closed
10/1/2011	8:39:58 AM	Bubbler valve closed
10/1/2011	8:39:58 AM	Helium valve opened
10/1/2011	8:39:58 AM	Main Vac valve opened
10/1/2011	8:39:58 AM	Helium MFC set to  20.000000
10/1/2011	8:39:58 AM	H2 MFC set to  0.000000
10/1/2011	8:39:58 AM	BCl3 MFC set to  0.000000
10/1/2011	8:39:58 AM	PHl3 MFC set to  0.000000
10/1/2011	8:39:58 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:39:58 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:39:58 AM	Tube furnace set to 150
10/1/2011	8:40:28 AM	Helium valve closed
10/1/2011	8:40:28 AM	H2 valve closed
10/1/2011	8:40:28 AM	BCl3 valve closed
10/1/2011	8:40:28 AM	PH3 valve closed
10/1/2011	8:40:28 AM	SiCl4 pre valve closed
10/1/2011	8:40:28 AM	SiCl4 post valve closed
10/1/2011	8:40:28 AM	Bypass valve closed
10/1/2011	8:40:28 AM	Bubbler valve closed
10/1/2011	8:40:28 AM	Main Vac valve opened
10/1/2011	8:40:28 AM	Helium MFC set to  0.000000
10/1/2011	8:40:28 AM	H2 MFC set to  0.000000
10/1/2011	8:40:28 AM	BCl3 MFC set to  0.000000
10/1/2011	8:40:28 AM	PHl3 MFC set to  0.000000
10/1/2011	8:40:28 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:40:28 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:40:28 AM	Tube furnace set to 150
10/1/2011	8:40:59 AM	H2 valve closed
10/1/2011	8:40:59 AM	BCl3 valve closed
10/1/2011	8:40:59 AM	PH3 valve closed
10/1/2011	8:40:59 AM	SiCl4 pre valve closed
10/1/2011	8:40:59 AM	SiCl4 post valve closed
10/1/2011	8:40:59 AM	Bypass valve closed
10/1/2011	8:40:59 AM	Bubbler valve closed
10/1/2011	8:40:59 AM	Helium valve opened
10/1/2011	8:40:59 AM	Main Vac valve opened
10/1/2011	8:40:59 AM	Helium MFC set to  20.000000
10/1/2011	8:40:59 AM	H2 MFC set to  0.000000
10/1/2011	8:40:59 AM	BCl3 MFC set to  0.000000
10/1/2011	8:40:59 AM	PHl3 MFC set to  0.000000
10/1/2011	8:40:59 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:40:59 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:40:59 AM	Tube furnace set to 150
10/1/2011	8:41:29 AM	Helium valve closed
10/1/2011	8:41:29 AM	H2 valve closed
10/1/2011	8:41:29 AM	BCl3 valve closed
10/1/2011	8:41:29 AM	PH3 valve closed
10/1/2011	8:41:29 AM	SiCl4 pre valve closed
10/1/2011	8:41:29 AM	SiCl4 post valve closed
10/1/2011	8:41:29 AM	Bypass valve closed
10/1/2011	8:41:29 AM	Bubbler valve closed
10/1/2011	8:41:29 AM	Main Vac valve opened
10/1/2011	8:41:29 AM	Helium MFC set to  0.000000
10/1/2011	8:41:29 AM	H2 MFC set to  0.000000
10/1/2011	8:41:29 AM	BCl3 MFC set to  0.000000
10/1/2011	8:41:29 AM	PHl3 MFC set to  0.000000
10/1/2011	8:41:29 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:41:29 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:41:29 AM	Tube furnace set to 150
10/1/2011	8:41:59 AM	H2 valve closed
10/1/2011	8:41:59 AM	BCl3 valve closed
10/1/2011	8:41:59 AM	PH3 valve closed
10/1/2011	8:41:59 AM	SiCl4 pre valve closed
10/1/2011	8:41:59 AM	SiCl4 post valve closed
10/1/2011	8:41:59 AM	Bypass valve closed
10/1/2011	8:41:59 AM	Bubbler valve closed
10/1/2011	8:41:59 AM	Helium valve opened
10/1/2011	8:41:59 AM	Main Vac valve opened
10/1/2011	8:41:59 AM	Helium MFC set to  20.000000
10/1/2011	8:41:59 AM	H2 MFC set to  0.000000
10/1/2011	8:41:59 AM	BCl3 MFC set to  0.000000
10/1/2011	8:41:59 AM	PHl3 MFC set to  0.000000
10/1/2011	8:41:59 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:41:59 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:41:59 AM	Tube furnace set to 150
10/1/2011	8:42:29 AM	Helium valve closed
10/1/2011	8:42:29 AM	H2 valve closed
10/1/2011	8:42:29 AM	BCl3 valve closed
10/1/2011	8:42:29 AM	PH3 valve closed
10/1/2011	8:42:29 AM	SiCl4 pre valve closed
10/1/2011	8:42:29 AM	SiCl4 post valve closed
10/1/2011	8:42:29 AM	Bypass valve closed
10/1/2011	8:42:29 AM	Bubbler valve closed
10/1/2011	8:42:29 AM	Main Vac valve opened
10/1/2011	8:42:29 AM	Helium MFC set to  0.000000
10/1/2011	8:42:29 AM	H2 MFC set to  0.000000
10/1/2011	8:42:29 AM	BCl3 MFC set to  0.000000
10/1/2011	8:42:29 AM	PHl3 MFC set to  0.000000
10/1/2011	8:42:29 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:42:29 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:42:29 AM	Tube furnace set to 150
10/1/2011	8:42:30 AM	Run finished at 8:42 AM
10/1/2011	8:47:03 AM	Main Vac valve closed
10/1/2011	8:47:32 AM	Main Vac valve opened
10/1/2011	8:49:46 AM	Recipe started at 8:49 AM
10/1/2011	8:49:46 AM	Helium valve closed
10/1/2011	8:49:46 AM	H2 valve closed
10/1/2011	8:49:46 AM	BCl3 valve closed
10/1/2011	8:49:46 AM	PH3 valve closed
10/1/2011	8:49:46 AM	SiCl4 pre valve closed
10/1/2011	8:49:46 AM	SiCl4 post valve closed
10/1/2011	8:49:46 AM	Main Vac valve closed
10/1/2011	8:49:46 AM	Bypass valve closed
10/1/2011	8:49:46 AM	Bubbler valve closed
10/1/2011	8:49:46 AM	Helium MFC set to  0.000000
10/1/2011	8:49:46 AM	H2 MFC set to  0.000000
10/1/2011	8:49:46 AM	BCl3 MFC set to  0.000000
10/1/2011	8:49:46 AM	PHl3 MFC set to  0.000000
10/1/2011	8:49:46 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:49:46 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:49:46 AM	Tube furnace set to 0
10/1/2011	8:49:49 AM	Helium valve closed
10/1/2011	8:49:49 AM	BCl3 valve closed
10/1/2011	8:49:49 AM	PH3 valve closed
10/1/2011	8:49:49 AM	SiCl4 pre valve closed
10/1/2011	8:49:49 AM	SiCl4 post valve closed
10/1/2011	8:49:49 AM	Main Vac valve closed
10/1/2011	8:49:49 AM	Bypass valve closed
10/1/2011	8:49:49 AM	Bubbler valve closed
10/1/2011	8:49:49 AM	H2 valve opened
10/1/2011	8:49:49 AM	Helium MFC set to  0.000000
10/1/2011	8:49:49 AM	H2 MFC set to  500.000000
10/1/2011	8:49:49 AM	BCl3 MFC set to  0.000000
10/1/2011	8:49:49 AM	PHl3 MFC set to  0.000000
10/1/2011	8:49:49 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:49:49 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:49:49 AM	Tube furnace set to 0
10/1/2011	8:50:52 AM	Helium valve closed
10/1/2011	8:50:52 AM	BCl3 valve closed
10/1/2011	8:50:52 AM	PH3 valve closed
10/1/2011	8:50:52 AM	SiCl4 pre valve closed
10/1/2011	8:50:52 AM	SiCl4 post valve closed
10/1/2011	8:50:52 AM	Main Vac valve closed
10/1/2011	8:50:52 AM	Bypass valve closed
10/1/2011	8:50:52 AM	H2 valve opened
10/1/2011	8:50:52 AM	Bubbler valve opened
10/1/2011	8:50:52 AM	Helium MFC set to  0.000000
10/1/2011	8:50:52 AM	H2 MFC set to  500.000000
10/1/2011	8:50:52 AM	BCl3 MFC set to  0.000000
10/1/2011	8:50:52 AM	PHl3 MFC set to  0.000000
10/1/2011	8:50:52 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:50:52 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:50:52 AM	Tube furnace set to 0
10/1/2011	8:50:53 AM	Helium valve closed
10/1/2011	8:50:53 AM	BCl3 valve closed
10/1/2011	8:50:53 AM	PH3 valve closed
10/1/2011	8:50:53 AM	SiCl4 pre valve closed
10/1/2011	8:50:53 AM	SiCl4 post valve closed
10/1/2011	8:50:53 AM	Main Vac valve closed
10/1/2011	8:50:53 AM	Bypass valve closed
10/1/2011	8:50:53 AM	H2 valve opened
10/1/2011	8:50:53 AM	Bubbler valve opened
10/1/2011	8:50:53 AM	Helium MFC set to  0.000000
10/1/2011	8:50:53 AM	H2 MFC set to  500.000000
10/1/2011	8:50:53 AM	BCl3 MFC set to  0.000000
10/1/2011	8:50:53 AM	PHl3 MFC set to  0.000000
10/1/2011	8:50:53 AM	SiCl4 MFC set to  0.000000
10/1/2011	8:50:53 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	8:50:54 AM	Tube furnace set to 1000
10/1/2011	9:10:54 AM	Helium valve closed
10/1/2011	9:10:54 AM	PH3 valve closed
10/1/2011	9:10:54 AM	Main Vac valve closed
10/1/2011	9:10:54 AM	Bypass valve closed
10/1/2011	9:10:54 AM	H2 valve opened
10/1/2011	9:10:54 AM	BCl3 valve opened
10/1/2011	9:10:54 AM	SiCl4 pre valve opened
10/1/2011	9:10:54 AM	SiCl4 post valve opened
10/1/2011	9:10:54 AM	Bubbler valve opened
10/1/2011	9:10:54 AM	Helium MFC set to  0.000000
10/1/2011	9:10:54 AM	H2 MFC set to  500.000000
10/1/2011	9:10:54 AM	BCl3 MFC set to  2.500000
10/1/2011	9:10:54 AM	PHl3 MFC set to  0.000000
10/1/2011	9:10:54 AM	SiCl4 MFC set to  50.000000
10/1/2011	9:10:54 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:10:54 AM	Tube furnace set to 1000
10/1/2011	9:20:54 AM	Helium valve closed
10/1/2011	9:20:54 AM	BCl3 valve closed
10/1/2011	9:20:54 AM	PH3 valve closed
10/1/2011	9:20:54 AM	SiCl4 pre valve closed
10/1/2011	9:20:54 AM	SiCl4 post valve closed
10/1/2011	9:20:54 AM	Main Vac valve closed
10/1/2011	9:20:54 AM	Bypass valve closed
10/1/2011	9:20:54 AM	H2 valve opened
10/1/2011	9:20:54 AM	Bubbler valve opened
10/1/2011	9:20:54 AM	Helium MFC set to  0.000000
10/1/2011	9:20:54 AM	H2 MFC set to  500.000000
10/1/2011	9:20:54 AM	BCl3 MFC set to  0.000000
10/1/2011	9:20:54 AM	PHl3 MFC set to  0.000000
10/1/2011	9:20:54 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:20:54 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:20:54 AM	Tube furnace set to 750
10/1/2011	9:25:54 AM	H2 valve closed
10/1/2011	9:25:54 AM	BCl3 valve closed
10/1/2011	9:25:54 AM	PH3 valve closed
10/1/2011	9:25:54 AM	SiCl4 pre valve closed
10/1/2011	9:25:54 AM	SiCl4 post valve closed
10/1/2011	9:25:54 AM	Main Vac valve closed
10/1/2011	9:25:54 AM	Bypass valve closed
10/1/2011	9:25:54 AM	Helium valve opened
10/1/2011	9:25:54 AM	Bubbler valve opened
10/1/2011	9:25:54 AM	Helium MFC set to  500.000000
10/1/2011	9:25:54 AM	H2 MFC set to  0.000000
10/1/2011	9:25:54 AM	BCl3 MFC set to  0.000000
10/1/2011	9:25:54 AM	PHl3 MFC set to  0.000000
10/1/2011	9:25:54 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:25:54 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:25:54 AM	Tube furnace set to 0
10/1/2011	9:45:54 AM	Helium valve closed
10/1/2011	9:45:54 AM	H2 valve closed
10/1/2011	9:45:54 AM	BCl3 valve closed
10/1/2011	9:45:54 AM	PH3 valve closed
10/1/2011	9:45:54 AM	SiCl4 pre valve closed
10/1/2011	9:45:54 AM	SiCl4 post valve closed
10/1/2011	9:45:54 AM	Main Vac valve closed
10/1/2011	9:45:54 AM	Bypass valve closed
10/1/2011	9:45:54 AM	Bubbler valve closed
10/1/2011	9:45:54 AM	Helium MFC set to  0.000000
10/1/2011	9:45:54 AM	H2 MFC set to  0.000000
10/1/2011	9:45:54 AM	BCl3 MFC set to  0.000000
10/1/2011	9:45:54 AM	PHl3 MFC set to  0.000000
10/1/2011	9:45:54 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:45:54 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:45:54 AM	Tube furnace set to 0
10/1/2011	9:45:55 AM	Run finished at 9:45 AM
10/1/2011	9:48:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	9:48:21 AM	Recipe started at 9:48 AM
10/1/2011	9:48:21 AM	Helium valve closed
10/1/2011	9:48:21 AM	H2 valve closed
10/1/2011	9:48:21 AM	BCl3 valve closed
10/1/2011	9:48:21 AM	PH3 valve closed
10/1/2011	9:48:21 AM	SiCl4 pre valve closed
10/1/2011	9:48:21 AM	SiCl4 post valve closed
10/1/2011	9:48:21 AM	Main Vac valve closed
10/1/2011	9:48:21 AM	Bypass valve closed
10/1/2011	9:48:21 AM	Bubbler valve closed
10/1/2011	9:48:21 AM	Helium MFC set to  0.000000
10/1/2011	9:48:21 AM	H2 MFC set to  0.000000
10/1/2011	9:48:21 AM	BCl3 MFC set to  0.000000
10/1/2011	9:48:21 AM	PHl3 MFC set to  0.000000
10/1/2011	9:48:21 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:48:21 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:48:22 AM	Tube furnace set to 0
10/1/2011	9:48:25 AM	H2 valve closed
10/1/2011	9:48:25 AM	BCl3 valve closed
10/1/2011	9:48:25 AM	PH3 valve closed
10/1/2011	9:48:25 AM	SiCl4 pre valve closed
10/1/2011	9:48:25 AM	SiCl4 post valve closed
10/1/2011	9:48:25 AM	Main Vac valve closed
10/1/2011	9:48:25 AM	Bypass valve closed
10/1/2011	9:48:25 AM	Bubbler valve closed
10/1/2011	9:48:25 AM	Helium valve opened
10/1/2011	9:48:25 AM	Helium MFC set to  500.000000
10/1/2011	9:48:25 AM	H2 MFC set to  0.000000
10/1/2011	9:48:25 AM	BCl3 MFC set to  0.000000
10/1/2011	9:48:25 AM	PHl3 MFC set to  0.000000
10/1/2011	9:48:25 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:48:25 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:48:25 AM	Tube furnace set to 0
10/1/2011	9:48:25 AM	Helium valve closed
10/1/2011	9:48:25 AM	H2 valve closed
10/1/2011	9:48:25 AM	BCl3 valve closed
10/1/2011	9:48:25 AM	PH3 valve closed
10/1/2011	9:48:25 AM	SiCl4 pre valve closed
10/1/2011	9:48:25 AM	SiCl4 post valve closed
10/1/2011	9:48:25 AM	Main Vac valve closed
10/1/2011	9:48:25 AM	Bypass valve closed
10/1/2011	9:48:25 AM	Bubbler valve closed
10/1/2011	9:48:25 AM	Helium MFC set to  0.000000
10/1/2011	9:48:25 AM	H2 MFC set to  0.000000
10/1/2011	9:48:25 AM	BCl3 MFC set to  0.000000
10/1/2011	9:48:25 AM	PHl3 MFC set to  0.000000
10/1/2011	9:48:25 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:48:25 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:48:25 AM	Tube furnace set to 0
10/1/2011	9:48:26 AM	Run finished at 9:48 AM
10/1/2011	9:48:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	9:52:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	9:52:32 AM	Recipe started at 9:52 AM
10/1/2011	9:52:32 AM	Helium valve closed
10/1/2011	9:52:32 AM	H2 valve closed
10/1/2011	9:52:32 AM	BCl3 valve closed
10/1/2011	9:52:32 AM	PH3 valve closed
10/1/2011	9:52:32 AM	SiCl4 pre valve closed
10/1/2011	9:52:32 AM	SiCl4 post valve closed
10/1/2011	9:52:32 AM	Main Vac valve closed
10/1/2011	9:52:32 AM	Bubbler valve closed
10/1/2011	9:52:32 AM	Bypass valve opened
10/1/2011	9:52:32 AM	Helium MFC set to  0.000000
10/1/2011	9:52:32 AM	H2 MFC set to  0.000000
10/1/2011	9:52:32 AM	BCl3 MFC set to  0.000000
10/1/2011	9:52:32 AM	PHl3 MFC set to  0.000000
10/1/2011	9:52:32 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:52:32 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:52:32 AM	Tube furnace set to 0
10/1/2011	9:53:39 AM	Helium valve closed
10/1/2011	9:53:39 AM	H2 valve closed
10/1/2011	9:53:39 AM	BCl3 valve closed
10/1/2011	9:53:39 AM	PH3 valve closed
10/1/2011	9:53:39 AM	SiCl4 pre valve closed
10/1/2011	9:53:39 AM	SiCl4 post valve closed
10/1/2011	9:53:39 AM	Main Vac valve closed
10/1/2011	9:53:39 AM	Bubbler valve closed
10/1/2011	9:53:39 AM	Bypass valve opened
10/1/2011	9:53:39 AM	Helium MFC set to  0.000000
10/1/2011	9:53:39 AM	H2 MFC set to  0.000000
10/1/2011	9:53:39 AM	BCl3 MFC set to  0.000000
10/1/2011	9:53:39 AM	PHl3 MFC set to  0.000000
10/1/2011	9:53:39 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:53:39 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:53:39 AM	Tube furnace set to 0
10/1/2011	9:53:51 AM	Helium valve closed
10/1/2011	9:53:51 AM	H2 valve closed
10/1/2011	9:53:51 AM	BCl3 valve closed
10/1/2011	9:53:51 AM	PH3 valve closed
10/1/2011	9:53:51 AM	SiCl4 pre valve closed
10/1/2011	9:53:51 AM	SiCl4 post valve closed
10/1/2011	9:53:51 AM	Bypass valve closed
10/1/2011	9:53:51 AM	Bubbler valve closed
10/1/2011	9:53:51 AM	Main Vac valve opened
10/1/2011	9:53:51 AM	Helium MFC set to  0.000000
10/1/2011	9:53:51 AM	H2 MFC set to  0.000000
10/1/2011	9:53:51 AM	BCl3 MFC set to  0.000000
10/1/2011	9:53:51 AM	PHl3 MFC set to  0.000000
10/1/2011	9:53:51 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:53:51 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:53:51 AM	Tube furnace set to 0
10/1/2011	9:53:52 AM	Run finished at 9:53 AM
10/1/2011	9:53:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	9:54:42 AM	Recipe started at 9:54 AM
10/1/2011	9:54:42 AM	Helium valve closed
10/1/2011	9:54:42 AM	H2 valve closed
10/1/2011	9:54:42 AM	PH3 valve closed
10/1/2011	9:54:42 AM	SiCl4 pre valve closed
10/1/2011	9:54:42 AM	SiCl4 post valve closed
10/1/2011	9:54:42 AM	Bypass valve closed
10/1/2011	9:54:42 AM	Bubbler valve closed
10/1/2011	9:54:42 AM	BCl3 valve opened
10/1/2011	9:54:42 AM	Main Vac valve opened
10/1/2011	9:54:42 AM	Helium MFC set to  0.000000
10/1/2011	9:54:42 AM	H2 MFC set to  0.000000
10/1/2011	9:54:42 AM	BCl3 MFC set to  0.000000
10/1/2011	9:54:42 AM	PHl3 MFC set to  0.000000
10/1/2011	9:54:42 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:54:42 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:54:43 AM	Tube furnace set to 150
10/1/2011	9:55:13 AM	H2 valve closed
10/1/2011	9:55:13 AM	BCl3 valve closed
10/1/2011	9:55:13 AM	PH3 valve closed
10/1/2011	9:55:13 AM	SiCl4 pre valve closed
10/1/2011	9:55:13 AM	SiCl4 post valve closed
10/1/2011	9:55:13 AM	Bypass valve closed
10/1/2011	9:55:13 AM	Bubbler valve closed
10/1/2011	9:55:13 AM	Helium valve opened
10/1/2011	9:55:13 AM	Main Vac valve opened
10/1/2011	9:55:13 AM	Helium MFC set to  20.000000
10/1/2011	9:55:13 AM	H2 MFC set to  0.000000
10/1/2011	9:55:13 AM	BCl3 MFC set to  0.000000
10/1/2011	9:55:13 AM	PHl3 MFC set to  0.000000
10/1/2011	9:55:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:55:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:55:13 AM	Tube furnace set to 150
10/1/2011	9:55:43 AM	Helium valve closed
10/1/2011	9:55:43 AM	H2 valve closed
10/1/2011	9:55:43 AM	BCl3 valve closed
10/1/2011	9:55:43 AM	PH3 valve closed
10/1/2011	9:55:43 AM	SiCl4 pre valve closed
10/1/2011	9:55:43 AM	SiCl4 post valve closed
10/1/2011	9:55:43 AM	Bypass valve closed
10/1/2011	9:55:43 AM	Bubbler valve closed
10/1/2011	9:55:43 AM	Main Vac valve opened
10/1/2011	9:55:43 AM	Helium MFC set to  0.000000
10/1/2011	9:55:43 AM	H2 MFC set to  0.000000
10/1/2011	9:55:43 AM	BCl3 MFC set to  0.000000
10/1/2011	9:55:43 AM	PHl3 MFC set to  0.000000
10/1/2011	9:55:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:55:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:55:43 AM	Tube furnace set to 150
10/1/2011	9:56:13 AM	H2 valve closed
10/1/2011	9:56:13 AM	BCl3 valve closed
10/1/2011	9:56:13 AM	PH3 valve closed
10/1/2011	9:56:13 AM	SiCl4 pre valve closed
10/1/2011	9:56:13 AM	SiCl4 post valve closed
10/1/2011	9:56:13 AM	Bypass valve closed
10/1/2011	9:56:13 AM	Bubbler valve closed
10/1/2011	9:56:13 AM	Helium valve opened
10/1/2011	9:56:13 AM	Main Vac valve opened
10/1/2011	9:56:13 AM	Helium MFC set to  20.000000
10/1/2011	9:56:13 AM	H2 MFC set to  0.000000
10/1/2011	9:56:13 AM	BCl3 MFC set to  0.000000
10/1/2011	9:56:13 AM	PHl3 MFC set to  0.000000
10/1/2011	9:56:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:56:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:56:13 AM	Tube furnace set to 150
10/1/2011	9:56:43 AM	Helium valve closed
10/1/2011	9:56:43 AM	H2 valve closed
10/1/2011	9:56:43 AM	BCl3 valve closed
10/1/2011	9:56:43 AM	PH3 valve closed
10/1/2011	9:56:43 AM	SiCl4 pre valve closed
10/1/2011	9:56:43 AM	SiCl4 post valve closed
10/1/2011	9:56:43 AM	Bypass valve closed
10/1/2011	9:56:43 AM	Bubbler valve closed
10/1/2011	9:56:43 AM	Main Vac valve opened
10/1/2011	9:56:43 AM	Helium MFC set to  0.000000
10/1/2011	9:56:43 AM	H2 MFC set to  0.000000
10/1/2011	9:56:43 AM	BCl3 MFC set to  0.000000
10/1/2011	9:56:43 AM	PHl3 MFC set to  0.000000
10/1/2011	9:56:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:56:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:56:43 AM	Tube furnace set to 150
10/1/2011	9:57:13 AM	H2 valve closed
10/1/2011	9:57:13 AM	BCl3 valve closed
10/1/2011	9:57:13 AM	PH3 valve closed
10/1/2011	9:57:14 AM	SiCl4 pre valve closed
10/1/2011	9:57:14 AM	SiCl4 post valve closed
10/1/2011	9:57:14 AM	Bypass valve closed
10/1/2011	9:57:14 AM	Bubbler valve closed
10/1/2011	9:57:14 AM	Helium valve opened
10/1/2011	9:57:14 AM	Main Vac valve opened
10/1/2011	9:57:14 AM	Helium MFC set to  20.000000
10/1/2011	9:57:14 AM	H2 MFC set to  0.000000
10/1/2011	9:57:14 AM	BCl3 MFC set to  0.000000
10/1/2011	9:57:14 AM	PHl3 MFC set to  0.000000
10/1/2011	9:57:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:57:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:57:14 AM	Tube furnace set to 150
10/1/2011	9:57:44 AM	Helium valve closed
10/1/2011	9:57:44 AM	H2 valve closed
10/1/2011	9:57:44 AM	BCl3 valve closed
10/1/2011	9:57:44 AM	PH3 valve closed
10/1/2011	9:57:44 AM	SiCl4 pre valve closed
10/1/2011	9:57:44 AM	SiCl4 post valve closed
10/1/2011	9:57:44 AM	Bypass valve closed
10/1/2011	9:57:44 AM	Bubbler valve closed
10/1/2011	9:57:44 AM	Main Vac valve opened
10/1/2011	9:57:44 AM	Helium MFC set to  0.000000
10/1/2011	9:57:44 AM	H2 MFC set to  0.000000
10/1/2011	9:57:44 AM	BCl3 MFC set to  0.000000
10/1/2011	9:57:44 AM	PHl3 MFC set to  0.000000
10/1/2011	9:57:44 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:57:44 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:57:44 AM	Tube furnace set to 150
10/1/2011	9:58:14 AM	H2 valve closed
10/1/2011	9:58:14 AM	BCl3 valve closed
10/1/2011	9:58:14 AM	PH3 valve closed
10/1/2011	9:58:14 AM	SiCl4 pre valve closed
10/1/2011	9:58:14 AM	SiCl4 post valve closed
10/1/2011	9:58:14 AM	Bypass valve closed
10/1/2011	9:58:14 AM	Bubbler valve closed
10/1/2011	9:58:14 AM	Helium valve opened
10/1/2011	9:58:14 AM	Main Vac valve opened
10/1/2011	9:58:14 AM	Helium MFC set to  20.000000
10/1/2011	9:58:14 AM	H2 MFC set to  0.000000
10/1/2011	9:58:14 AM	BCl3 MFC set to  0.000000
10/1/2011	9:58:14 AM	PHl3 MFC set to  0.000000
10/1/2011	9:58:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:58:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:58:14 AM	Tube furnace set to 150
10/1/2011	9:58:44 AM	Helium valve closed
10/1/2011	9:58:44 AM	H2 valve closed
10/1/2011	9:58:44 AM	BCl3 valve closed
10/1/2011	9:58:44 AM	PH3 valve closed
10/1/2011	9:58:44 AM	SiCl4 pre valve closed
10/1/2011	9:58:44 AM	SiCl4 post valve closed
10/1/2011	9:58:44 AM	Bypass valve closed
10/1/2011	9:58:44 AM	Bubbler valve closed
10/1/2011	9:58:44 AM	Main Vac valve opened
10/1/2011	9:58:44 AM	Helium MFC set to  0.000000
10/1/2011	9:58:44 AM	H2 MFC set to  0.000000
10/1/2011	9:58:44 AM	BCl3 MFC set to  0.000000
10/1/2011	9:58:44 AM	PHl3 MFC set to  0.000000
10/1/2011	9:58:44 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:58:44 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:58:44 AM	Tube furnace set to 150
10/1/2011	9:59:14 AM	H2 valve closed
10/1/2011	9:59:14 AM	BCl3 valve closed
10/1/2011	9:59:14 AM	PH3 valve closed
10/1/2011	9:59:14 AM	SiCl4 pre valve closed
10/1/2011	9:59:14 AM	SiCl4 post valve closed
10/1/2011	9:59:14 AM	Bypass valve closed
10/1/2011	9:59:14 AM	Bubbler valve closed
10/1/2011	9:59:14 AM	Helium valve opened
10/1/2011	9:59:14 AM	Main Vac valve opened
10/1/2011	9:59:14 AM	Helium MFC set to  20.000000
10/1/2011	9:59:14 AM	H2 MFC set to  0.000000
10/1/2011	9:59:14 AM	BCl3 MFC set to  0.000000
10/1/2011	9:59:14 AM	PHl3 MFC set to  0.000000
10/1/2011	9:59:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:59:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:59:15 AM	Tube furnace set to 150
10/1/2011	9:59:45 AM	Helium valve closed
10/1/2011	9:59:45 AM	H2 valve closed
10/1/2011	9:59:45 AM	BCl3 valve closed
10/1/2011	9:59:45 AM	PH3 valve closed
10/1/2011	9:59:45 AM	SiCl4 pre valve closed
10/1/2011	9:59:45 AM	SiCl4 post valve closed
10/1/2011	9:59:45 AM	Bypass valve closed
10/1/2011	9:59:45 AM	Bubbler valve closed
10/1/2011	9:59:45 AM	Main Vac valve opened
10/1/2011	9:59:45 AM	Helium MFC set to  0.000000
10/1/2011	9:59:45 AM	H2 MFC set to  0.000000
10/1/2011	9:59:45 AM	BCl3 MFC set to  0.000000
10/1/2011	9:59:45 AM	PHl3 MFC set to  0.000000
10/1/2011	9:59:45 AM	SiCl4 MFC set to  0.000000
10/1/2011	9:59:45 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	9:59:45 AM	Tube furnace set to 150
10/1/2011	10:00:15 AM	H2 valve closed
10/1/2011	10:00:15 AM	BCl3 valve closed
10/1/2011	10:00:15 AM	PH3 valve closed
10/1/2011	10:00:15 AM	SiCl4 pre valve closed
10/1/2011	10:00:15 AM	SiCl4 post valve closed
10/1/2011	10:00:15 AM	Bypass valve closed
10/1/2011	10:00:15 AM	Bubbler valve closed
10/1/2011	10:00:15 AM	Helium valve opened
10/1/2011	10:00:15 AM	Main Vac valve opened
10/1/2011	10:00:15 AM	Helium MFC set to  20.000000
10/1/2011	10:00:15 AM	H2 MFC set to  0.000000
10/1/2011	10:00:15 AM	BCl3 MFC set to  0.000000
10/1/2011	10:00:15 AM	PHl3 MFC set to  0.000000
10/1/2011	10:00:15 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:00:15 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:00:15 AM	Tube furnace set to 150
10/1/2011	10:00:45 AM	Helium valve closed
10/1/2011	10:00:45 AM	H2 valve closed
10/1/2011	10:00:45 AM	BCl3 valve closed
10/1/2011	10:00:45 AM	PH3 valve closed
10/1/2011	10:00:45 AM	SiCl4 pre valve closed
10/1/2011	10:00:45 AM	SiCl4 post valve closed
10/1/2011	10:00:45 AM	Bypass valve closed
10/1/2011	10:00:45 AM	Bubbler valve closed
10/1/2011	10:00:45 AM	Main Vac valve opened
10/1/2011	10:00:45 AM	Helium MFC set to  0.000000
10/1/2011	10:00:45 AM	H2 MFC set to  0.000000
10/1/2011	10:00:45 AM	BCl3 MFC set to  0.000000
10/1/2011	10:00:45 AM	PHl3 MFC set to  0.000000
10/1/2011	10:00:45 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:00:45 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:00:45 AM	Tube furnace set to 150
10/1/2011	10:01:15 AM	H2 valve closed
10/1/2011	10:01:15 AM	BCl3 valve closed
10/1/2011	10:01:15 AM	PH3 valve closed
10/1/2011	10:01:15 AM	SiCl4 pre valve closed
10/1/2011	10:01:15 AM	SiCl4 post valve closed
10/1/2011	10:01:15 AM	Bypass valve closed
10/1/2011	10:01:15 AM	Bubbler valve closed
10/1/2011	10:01:15 AM	Helium valve opened
10/1/2011	10:01:15 AM	Main Vac valve opened
10/1/2011	10:01:15 AM	Helium MFC set to  20.000000
10/1/2011	10:01:15 AM	H2 MFC set to  0.000000
10/1/2011	10:01:15 AM	BCl3 MFC set to  0.000000
10/1/2011	10:01:15 AM	PHl3 MFC set to  0.000000
10/1/2011	10:01:15 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:01:15 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:01:15 AM	Tube furnace set to 150
10/1/2011	10:01:45 AM	Helium valve closed
10/1/2011	10:01:45 AM	H2 valve closed
10/1/2011	10:01:45 AM	BCl3 valve closed
10/1/2011	10:01:45 AM	PH3 valve closed
10/1/2011	10:01:45 AM	SiCl4 pre valve closed
10/1/2011	10:01:45 AM	SiCl4 post valve closed
10/1/2011	10:01:45 AM	Bypass valve closed
10/1/2011	10:01:45 AM	Bubbler valve closed
10/1/2011	10:01:45 AM	Main Vac valve opened
10/1/2011	10:01:45 AM	Helium MFC set to  0.000000
10/1/2011	10:01:45 AM	H2 MFC set to  0.000000
10/1/2011	10:01:45 AM	BCl3 MFC set to  0.000000
10/1/2011	10:01:45 AM	PHl3 MFC set to  0.000000
10/1/2011	10:01:45 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:01:45 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:01:46 AM	Tube furnace set to 150
10/1/2011	10:02:16 AM	H2 valve closed
10/1/2011	10:02:16 AM	BCl3 valve closed
10/1/2011	10:02:16 AM	PH3 valve closed
10/1/2011	10:02:16 AM	SiCl4 pre valve closed
10/1/2011	10:02:16 AM	SiCl4 post valve closed
10/1/2011	10:02:16 AM	Bypass valve closed
10/1/2011	10:02:16 AM	Bubbler valve closed
10/1/2011	10:02:16 AM	Helium valve opened
10/1/2011	10:02:16 AM	Main Vac valve opened
10/1/2011	10:02:16 AM	Helium MFC set to  20.000000
10/1/2011	10:02:16 AM	H2 MFC set to  0.000000
10/1/2011	10:02:16 AM	BCl3 MFC set to  0.000000
10/1/2011	10:02:16 AM	PHl3 MFC set to  0.000000
10/1/2011	10:02:16 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:02:16 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:02:16 AM	Tube furnace set to 150
10/1/2011	10:02:46 AM	Helium valve closed
10/1/2011	10:02:46 AM	H2 valve closed
10/1/2011	10:02:46 AM	BCl3 valve closed
10/1/2011	10:02:46 AM	PH3 valve closed
10/1/2011	10:02:46 AM	SiCl4 pre valve closed
10/1/2011	10:02:46 AM	SiCl4 post valve closed
10/1/2011	10:02:46 AM	Bypass valve closed
10/1/2011	10:02:46 AM	Bubbler valve closed
10/1/2011	10:02:46 AM	Main Vac valve opened
10/1/2011	10:02:46 AM	Helium MFC set to  0.000000
10/1/2011	10:02:46 AM	H2 MFC set to  0.000000
10/1/2011	10:02:46 AM	BCl3 MFC set to  0.000000
10/1/2011	10:02:46 AM	PHl3 MFC set to  0.000000
10/1/2011	10:02:46 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:02:46 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:02:46 AM	Tube furnace set to 150
10/1/2011	10:03:16 AM	H2 valve closed
10/1/2011	10:03:16 AM	BCl3 valve closed
10/1/2011	10:03:16 AM	PH3 valve closed
10/1/2011	10:03:16 AM	SiCl4 pre valve closed
10/1/2011	10:03:16 AM	SiCl4 post valve closed
10/1/2011	10:03:16 AM	Bypass valve closed
10/1/2011	10:03:16 AM	Bubbler valve closed
10/1/2011	10:03:16 AM	Helium valve opened
10/1/2011	10:03:16 AM	Main Vac valve opened
10/1/2011	10:03:16 AM	Helium MFC set to  20.000000
10/1/2011	10:03:16 AM	H2 MFC set to  0.000000
10/1/2011	10:03:16 AM	BCl3 MFC set to  0.000000
10/1/2011	10:03:16 AM	PHl3 MFC set to  0.000000
10/1/2011	10:03:16 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:03:16 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:03:16 AM	Tube furnace set to 150
10/1/2011	10:03:46 AM	Helium valve closed
10/1/2011	10:03:46 AM	H2 valve closed
10/1/2011	10:03:46 AM	BCl3 valve closed
10/1/2011	10:03:46 AM	PH3 valve closed
10/1/2011	10:03:46 AM	SiCl4 pre valve closed
10/1/2011	10:03:46 AM	SiCl4 post valve closed
10/1/2011	10:03:46 AM	Bypass valve closed
10/1/2011	10:03:46 AM	Bubbler valve closed
10/1/2011	10:03:46 AM	Main Vac valve opened
10/1/2011	10:03:46 AM	Helium MFC set to  0.000000
10/1/2011	10:03:46 AM	H2 MFC set to  0.000000
10/1/2011	10:03:46 AM	BCl3 MFC set to  0.000000
10/1/2011	10:03:46 AM	PHl3 MFC set to  0.000000
10/1/2011	10:03:46 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:03:46 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:03:46 AM	Tube furnace set to 150
10/1/2011	10:04:17 AM	H2 valve closed
10/1/2011	10:04:17 AM	BCl3 valve closed
10/1/2011	10:04:17 AM	PH3 valve closed
10/1/2011	10:04:17 AM	SiCl4 pre valve closed
10/1/2011	10:04:17 AM	SiCl4 post valve closed
10/1/2011	10:04:17 AM	Bypass valve closed
10/1/2011	10:04:17 AM	Bubbler valve closed
10/1/2011	10:04:17 AM	Helium valve opened
10/1/2011	10:04:17 AM	Main Vac valve opened
10/1/2011	10:04:17 AM	Helium MFC set to  20.000000
10/1/2011	10:04:17 AM	H2 MFC set to  0.000000
10/1/2011	10:04:17 AM	BCl3 MFC set to  0.000000
10/1/2011	10:04:17 AM	PHl3 MFC set to  0.000000
10/1/2011	10:04:17 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:04:17 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:04:17 AM	Tube furnace set to 150
10/1/2011	10:04:47 AM	Helium valve closed
10/1/2011	10:04:47 AM	H2 valve closed
10/1/2011	10:04:47 AM	BCl3 valve closed
10/1/2011	10:04:47 AM	PH3 valve closed
10/1/2011	10:04:47 AM	SiCl4 pre valve closed
10/1/2011	10:04:47 AM	SiCl4 post valve closed
10/1/2011	10:04:47 AM	Bypass valve closed
10/1/2011	10:04:47 AM	Bubbler valve closed
10/1/2011	10:04:47 AM	Main Vac valve opened
10/1/2011	10:04:47 AM	Helium MFC set to  0.000000
10/1/2011	10:04:47 AM	H2 MFC set to  0.000000
10/1/2011	10:04:47 AM	BCl3 MFC set to  0.000000
10/1/2011	10:04:47 AM	PHl3 MFC set to  0.000000
10/1/2011	10:04:47 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:04:47 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:04:47 AM	Tube furnace set to 150
10/1/2011	10:04:48 AM	Run finished at 10:04 AM
10/1/2011	10:09:00 AM	Recipe started at 10:08 AM
10/1/2011	10:09:00 AM	Helium valve closed
10/1/2011	10:09:00 AM	H2 valve closed
10/1/2011	10:09:00 AM	PH3 valve closed
10/1/2011	10:09:00 AM	SiCl4 pre valve closed
10/1/2011	10:09:00 AM	SiCl4 post valve closed
10/1/2011	10:09:00 AM	Bypass valve closed
10/1/2011	10:09:00 AM	Bubbler valve closed
10/1/2011	10:09:00 AM	BCl3 valve opened
10/1/2011	10:09:00 AM	Main Vac valve opened
10/1/2011	10:09:00 AM	Helium MFC set to  0.000000
10/1/2011	10:09:00 AM	H2 MFC set to  0.000000
10/1/2011	10:09:00 AM	BCl3 MFC set to  0.000000
10/1/2011	10:09:00 AM	PHl3 MFC set to  0.000000
10/1/2011	10:09:00 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:09:00 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:09:01 AM	Tube furnace set to 150
10/1/2011	10:09:31 AM	H2 valve closed
10/1/2011	10:09:31 AM	BCl3 valve closed
10/1/2011	10:09:31 AM	PH3 valve closed
10/1/2011	10:09:31 AM	SiCl4 pre valve closed
10/1/2011	10:09:31 AM	SiCl4 post valve closed
10/1/2011	10:09:31 AM	Bypass valve closed
10/1/2011	10:09:31 AM	Bubbler valve closed
10/1/2011	10:09:31 AM	Helium valve opened
10/1/2011	10:09:31 AM	Main Vac valve opened
10/1/2011	10:09:31 AM	Helium MFC set to  20.000000
10/1/2011	10:09:31 AM	H2 MFC set to  0.000000
10/1/2011	10:09:31 AM	BCl3 MFC set to  0.000000
10/1/2011	10:09:31 AM	PHl3 MFC set to  0.000000
10/1/2011	10:09:31 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:09:31 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:09:31 AM	Tube furnace set to 150
10/1/2011	10:10:01 AM	Helium valve closed
10/1/2011	10:10:01 AM	H2 valve closed
10/1/2011	10:10:01 AM	BCl3 valve closed
10/1/2011	10:10:01 AM	PH3 valve closed
10/1/2011	10:10:01 AM	SiCl4 pre valve closed
10/1/2011	10:10:01 AM	SiCl4 post valve closed
10/1/2011	10:10:01 AM	Bypass valve closed
10/1/2011	10:10:01 AM	Bubbler valve closed
10/1/2011	10:10:01 AM	Main Vac valve opened
10/1/2011	10:10:01 AM	Helium MFC set to  0.000000
10/1/2011	10:10:01 AM	H2 MFC set to  0.000000
10/1/2011	10:10:01 AM	BCl3 MFC set to  0.000000
10/1/2011	10:10:01 AM	PHl3 MFC set to  0.000000
10/1/2011	10:10:01 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:10:01 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:10:01 AM	Tube furnace set to 150
10/1/2011	10:10:31 AM	H2 valve closed
10/1/2011	10:10:31 AM	BCl3 valve closed
10/1/2011	10:10:31 AM	PH3 valve closed
10/1/2011	10:10:31 AM	SiCl4 pre valve closed
10/1/2011	10:10:31 AM	SiCl4 post valve closed
10/1/2011	10:10:31 AM	Bypass valve closed
10/1/2011	10:10:31 AM	Bubbler valve closed
10/1/2011	10:10:31 AM	Helium valve opened
10/1/2011	10:10:31 AM	Main Vac valve opened
10/1/2011	10:10:31 AM	Helium MFC set to  20.000000
10/1/2011	10:10:31 AM	H2 MFC set to  0.000000
10/1/2011	10:10:31 AM	BCl3 MFC set to  0.000000
10/1/2011	10:10:31 AM	PHl3 MFC set to  0.000000
10/1/2011	10:10:31 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:10:31 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:10:31 AM	Tube furnace set to 150
10/1/2011	10:11:01 AM	Helium valve closed
10/1/2011	10:11:01 AM	H2 valve closed
10/1/2011	10:11:01 AM	BCl3 valve closed
10/1/2011	10:11:01 AM	PH3 valve closed
10/1/2011	10:11:01 AM	SiCl4 pre valve closed
10/1/2011	10:11:01 AM	SiCl4 post valve closed
10/1/2011	10:11:01 AM	Bypass valve closed
10/1/2011	10:11:01 AM	Bubbler valve closed
10/1/2011	10:11:01 AM	Main Vac valve opened
10/1/2011	10:11:01 AM	Helium MFC set to  0.000000
10/1/2011	10:11:01 AM	H2 MFC set to  0.000000
10/1/2011	10:11:01 AM	BCl3 MFC set to  0.000000
10/1/2011	10:11:01 AM	PHl3 MFC set to  0.000000
10/1/2011	10:11:01 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:11:01 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:11:01 AM	Tube furnace set to 150
10/1/2011	10:11:31 AM	H2 valve closed
10/1/2011	10:11:31 AM	BCl3 valve closed
10/1/2011	10:11:31 AM	PH3 valve closed
10/1/2011	10:11:31 AM	SiCl4 pre valve closed
10/1/2011	10:11:31 AM	SiCl4 post valve closed
10/1/2011	10:11:31 AM	Bypass valve closed
10/1/2011	10:11:31 AM	Bubbler valve closed
10/1/2011	10:11:31 AM	Helium valve opened
10/1/2011	10:11:31 AM	Main Vac valve opened
10/1/2011	10:11:31 AM	Helium MFC set to  20.000000
10/1/2011	10:11:31 AM	H2 MFC set to  0.000000
10/1/2011	10:11:31 AM	BCl3 MFC set to  0.000000
10/1/2011	10:11:31 AM	PHl3 MFC set to  0.000000
10/1/2011	10:11:31 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:11:31 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:11:32 AM	Tube furnace set to 150
10/1/2011	10:12:02 AM	Helium valve closed
10/1/2011	10:12:02 AM	H2 valve closed
10/1/2011	10:12:02 AM	BCl3 valve closed
10/1/2011	10:12:02 AM	PH3 valve closed
10/1/2011	10:12:02 AM	SiCl4 pre valve closed
10/1/2011	10:12:02 AM	SiCl4 post valve closed
10/1/2011	10:12:02 AM	Bypass valve closed
10/1/2011	10:12:02 AM	Bubbler valve closed
10/1/2011	10:12:02 AM	Main Vac valve opened
10/1/2011	10:12:02 AM	Helium MFC set to  0.000000
10/1/2011	10:12:02 AM	H2 MFC set to  0.000000
10/1/2011	10:12:02 AM	BCl3 MFC set to  0.000000
10/1/2011	10:12:02 AM	PHl3 MFC set to  0.000000
10/1/2011	10:12:02 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:12:02 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:12:02 AM	Tube furnace set to 150
10/1/2011	10:12:32 AM	H2 valve closed
10/1/2011	10:12:32 AM	BCl3 valve closed
10/1/2011	10:12:32 AM	PH3 valve closed
10/1/2011	10:12:32 AM	SiCl4 pre valve closed
10/1/2011	10:12:32 AM	SiCl4 post valve closed
10/1/2011	10:12:32 AM	Bypass valve closed
10/1/2011	10:12:32 AM	Bubbler valve closed
10/1/2011	10:12:32 AM	Helium valve opened
10/1/2011	10:12:32 AM	Main Vac valve opened
10/1/2011	10:12:32 AM	Helium MFC set to  20.000000
10/1/2011	10:12:32 AM	H2 MFC set to  0.000000
10/1/2011	10:12:32 AM	BCl3 MFC set to  0.000000
10/1/2011	10:12:32 AM	PHl3 MFC set to  0.000000
10/1/2011	10:12:32 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:12:32 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:12:32 AM	Tube furnace set to 150
10/1/2011	10:13:02 AM	Helium valve closed
10/1/2011	10:13:02 AM	H2 valve closed
10/1/2011	10:13:02 AM	BCl3 valve closed
10/1/2011	10:13:02 AM	PH3 valve closed
10/1/2011	10:13:02 AM	SiCl4 pre valve closed
10/1/2011	10:13:02 AM	SiCl4 post valve closed
10/1/2011	10:13:02 AM	Bypass valve closed
10/1/2011	10:13:02 AM	Bubbler valve closed
10/1/2011	10:13:02 AM	Main Vac valve opened
10/1/2011	10:13:02 AM	Helium MFC set to  0.000000
10/1/2011	10:13:02 AM	H2 MFC set to  0.000000
10/1/2011	10:13:02 AM	BCl3 MFC set to  0.000000
10/1/2011	10:13:02 AM	PHl3 MFC set to  0.000000
10/1/2011	10:13:02 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:13:02 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:13:02 AM	Tube furnace set to 150
10/1/2011	10:13:32 AM	H2 valve closed
10/1/2011	10:13:32 AM	BCl3 valve closed
10/1/2011	10:13:32 AM	PH3 valve closed
10/1/2011	10:13:32 AM	SiCl4 pre valve closed
10/1/2011	10:13:32 AM	SiCl4 post valve closed
10/1/2011	10:13:32 AM	Bypass valve closed
10/1/2011	10:13:32 AM	Bubbler valve closed
10/1/2011	10:13:32 AM	Helium valve opened
10/1/2011	10:13:32 AM	Main Vac valve opened
10/1/2011	10:13:32 AM	Helium MFC set to  20.000000
10/1/2011	10:13:32 AM	H2 MFC set to  0.000000
10/1/2011	10:13:32 AM	BCl3 MFC set to  0.000000
10/1/2011	10:13:32 AM	PHl3 MFC set to  0.000000
10/1/2011	10:13:32 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:13:32 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:13:32 AM	Tube furnace set to 150
10/1/2011	10:14:03 AM	Helium valve closed
10/1/2011	10:14:03 AM	H2 valve closed
10/1/2011	10:14:03 AM	BCl3 valve closed
10/1/2011	10:14:03 AM	PH3 valve closed
10/1/2011	10:14:03 AM	SiCl4 pre valve closed
10/1/2011	10:14:03 AM	SiCl4 post valve closed
10/1/2011	10:14:03 AM	Bypass valve closed
10/1/2011	10:14:03 AM	Bubbler valve closed
10/1/2011	10:14:03 AM	Main Vac valve opened
10/1/2011	10:14:03 AM	Helium MFC set to  0.000000
10/1/2011	10:14:03 AM	H2 MFC set to  0.000000
10/1/2011	10:14:03 AM	BCl3 MFC set to  0.000000
10/1/2011	10:14:03 AM	PHl3 MFC set to  0.000000
10/1/2011	10:14:03 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:14:03 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:14:03 AM	Tube furnace set to 150
10/1/2011	10:14:33 AM	H2 valve closed
10/1/2011	10:14:33 AM	BCl3 valve closed
10/1/2011	10:14:33 AM	PH3 valve closed
10/1/2011	10:14:33 AM	SiCl4 pre valve closed
10/1/2011	10:14:33 AM	SiCl4 post valve closed
10/1/2011	10:14:33 AM	Bypass valve closed
10/1/2011	10:14:33 AM	Bubbler valve closed
10/1/2011	10:14:33 AM	Helium valve opened
10/1/2011	10:14:33 AM	Main Vac valve opened
10/1/2011	10:14:33 AM	Helium MFC set to  20.000000
10/1/2011	10:14:33 AM	H2 MFC set to  0.000000
10/1/2011	10:14:33 AM	BCl3 MFC set to  0.000000
10/1/2011	10:14:33 AM	PHl3 MFC set to  0.000000
10/1/2011	10:14:33 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:14:33 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:14:33 AM	Tube furnace set to 150
10/1/2011	10:15:03 AM	Helium valve closed
10/1/2011	10:15:03 AM	H2 valve closed
10/1/2011	10:15:03 AM	BCl3 valve closed
10/1/2011	10:15:03 AM	PH3 valve closed
10/1/2011	10:15:03 AM	SiCl4 pre valve closed
10/1/2011	10:15:03 AM	SiCl4 post valve closed
10/1/2011	10:15:03 AM	Bypass valve closed
10/1/2011	10:15:03 AM	Bubbler valve closed
10/1/2011	10:15:03 AM	Main Vac valve opened
10/1/2011	10:15:03 AM	Helium MFC set to  0.000000
10/1/2011	10:15:03 AM	H2 MFC set to  0.000000
10/1/2011	10:15:03 AM	BCl3 MFC set to  0.000000
10/1/2011	10:15:03 AM	PHl3 MFC set to  0.000000
10/1/2011	10:15:03 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:15:03 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:15:03 AM	Tube furnace set to 150
10/1/2011	10:15:33 AM	H2 valve closed
10/1/2011	10:15:33 AM	BCl3 valve closed
10/1/2011	10:15:33 AM	PH3 valve closed
10/1/2011	10:15:33 AM	SiCl4 pre valve closed
10/1/2011	10:15:33 AM	SiCl4 post valve closed
10/1/2011	10:15:33 AM	Bypass valve closed
10/1/2011	10:15:33 AM	Bubbler valve closed
10/1/2011	10:15:33 AM	Helium valve opened
10/1/2011	10:15:33 AM	Main Vac valve opened
10/1/2011	10:15:33 AM	Helium MFC set to  20.000000
10/1/2011	10:15:33 AM	H2 MFC set to  0.000000
10/1/2011	10:15:33 AM	BCl3 MFC set to  0.000000
10/1/2011	10:15:33 AM	PHl3 MFC set to  0.000000
10/1/2011	10:15:33 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:15:33 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:15:33 AM	Tube furnace set to 150
10/1/2011	10:16:03 AM	Helium valve closed
10/1/2011	10:16:03 AM	H2 valve closed
10/1/2011	10:16:03 AM	BCl3 valve closed
10/1/2011	10:16:03 AM	PH3 valve closed
10/1/2011	10:16:03 AM	SiCl4 pre valve closed
10/1/2011	10:16:03 AM	SiCl4 post valve closed
10/1/2011	10:16:03 AM	Bypass valve closed
10/1/2011	10:16:03 AM	Bubbler valve closed
10/1/2011	10:16:03 AM	Main Vac valve opened
10/1/2011	10:16:03 AM	Helium MFC set to  0.000000
10/1/2011	10:16:03 AM	H2 MFC set to  0.000000
10/1/2011	10:16:03 AM	BCl3 MFC set to  0.000000
10/1/2011	10:16:03 AM	PHl3 MFC set to  0.000000
10/1/2011	10:16:03 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:16:03 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:16:04 AM	Tube furnace set to 150
10/1/2011	10:16:34 AM	H2 valve closed
10/1/2011	10:16:34 AM	BCl3 valve closed
10/1/2011	10:16:34 AM	PH3 valve closed
10/1/2011	10:16:34 AM	SiCl4 pre valve closed
10/1/2011	10:16:34 AM	SiCl4 post valve closed
10/1/2011	10:16:34 AM	Bypass valve closed
10/1/2011	10:16:34 AM	Bubbler valve closed
10/1/2011	10:16:34 AM	Helium valve opened
10/1/2011	10:16:34 AM	Main Vac valve opened
10/1/2011	10:16:34 AM	Helium MFC set to  20.000000
10/1/2011	10:16:34 AM	H2 MFC set to  0.000000
10/1/2011	10:16:34 AM	BCl3 MFC set to  0.000000
10/1/2011	10:16:34 AM	PHl3 MFC set to  0.000000
10/1/2011	10:16:34 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:16:34 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:16:34 AM	Tube furnace set to 150
10/1/2011	10:17:04 AM	Helium valve closed
10/1/2011	10:17:04 AM	H2 valve closed
10/1/2011	10:17:04 AM	BCl3 valve closed
10/1/2011	10:17:04 AM	PH3 valve closed
10/1/2011	10:17:04 AM	SiCl4 pre valve closed
10/1/2011	10:17:04 AM	SiCl4 post valve closed
10/1/2011	10:17:04 AM	Bypass valve closed
10/1/2011	10:17:04 AM	Bubbler valve closed
10/1/2011	10:17:04 AM	Main Vac valve opened
10/1/2011	10:17:04 AM	Helium MFC set to  0.000000
10/1/2011	10:17:04 AM	H2 MFC set to  0.000000
10/1/2011	10:17:04 AM	BCl3 MFC set to  0.000000
10/1/2011	10:17:04 AM	PHl3 MFC set to  0.000000
10/1/2011	10:17:04 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:17:04 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:17:04 AM	Tube furnace set to 150
10/1/2011	10:17:34 AM	H2 valve closed
10/1/2011	10:17:34 AM	BCl3 valve closed
10/1/2011	10:17:34 AM	PH3 valve closed
10/1/2011	10:17:34 AM	SiCl4 pre valve closed
10/1/2011	10:17:34 AM	SiCl4 post valve closed
10/1/2011	10:17:34 AM	Bypass valve closed
10/1/2011	10:17:34 AM	Bubbler valve closed
10/1/2011	10:17:34 AM	Helium valve opened
10/1/2011	10:17:34 AM	Main Vac valve opened
10/1/2011	10:17:34 AM	Helium MFC set to  20.000000
10/1/2011	10:17:34 AM	H2 MFC set to  0.000000
10/1/2011	10:17:34 AM	BCl3 MFC set to  0.000000
10/1/2011	10:17:34 AM	PHl3 MFC set to  0.000000
10/1/2011	10:17:34 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:17:34 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:17:34 AM	Tube furnace set to 150
10/1/2011	10:18:04 AM	Helium valve closed
10/1/2011	10:18:04 AM	H2 valve closed
10/1/2011	10:18:04 AM	BCl3 valve closed
10/1/2011	10:18:04 AM	PH3 valve closed
10/1/2011	10:18:04 AM	SiCl4 pre valve closed
10/1/2011	10:18:04 AM	SiCl4 post valve closed
10/1/2011	10:18:04 AM	Bypass valve closed
10/1/2011	10:18:04 AM	Bubbler valve closed
10/1/2011	10:18:04 AM	Main Vac valve opened
10/1/2011	10:18:04 AM	Helium MFC set to  0.000000
10/1/2011	10:18:04 AM	H2 MFC set to  0.000000
10/1/2011	10:18:04 AM	BCl3 MFC set to  0.000000
10/1/2011	10:18:04 AM	PHl3 MFC set to  0.000000
10/1/2011	10:18:04 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:18:04 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:18:04 AM	Tube furnace set to 150
10/1/2011	10:18:34 AM	H2 valve closed
10/1/2011	10:18:34 AM	BCl3 valve closed
10/1/2011	10:18:34 AM	PH3 valve closed
10/1/2011	10:18:34 AM	SiCl4 pre valve closed
10/1/2011	10:18:34 AM	SiCl4 post valve closed
10/1/2011	10:18:34 AM	Bypass valve closed
10/1/2011	10:18:34 AM	Bubbler valve closed
10/1/2011	10:18:34 AM	Helium valve opened
10/1/2011	10:18:34 AM	Main Vac valve opened
10/1/2011	10:18:34 AM	Helium MFC set to  20.000000
10/1/2011	10:18:34 AM	H2 MFC set to  0.000000
10/1/2011	10:18:34 AM	BCl3 MFC set to  0.000000
10/1/2011	10:18:34 AM	PHl3 MFC set to  0.000000
10/1/2011	10:18:34 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:18:34 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:18:35 AM	Tube furnace set to 150
10/1/2011	10:19:05 AM	Helium valve closed
10/1/2011	10:19:05 AM	H2 valve closed
10/1/2011	10:19:05 AM	BCl3 valve closed
10/1/2011	10:19:05 AM	PH3 valve closed
10/1/2011	10:19:05 AM	SiCl4 pre valve closed
10/1/2011	10:19:05 AM	SiCl4 post valve closed
10/1/2011	10:19:05 AM	Bypass valve closed
10/1/2011	10:19:05 AM	Bubbler valve closed
10/1/2011	10:19:05 AM	Main Vac valve opened
10/1/2011	10:19:05 AM	Helium MFC set to  0.000000
10/1/2011	10:19:05 AM	H2 MFC set to  0.000000
10/1/2011	10:19:05 AM	BCl3 MFC set to  0.000000
10/1/2011	10:19:05 AM	PHl3 MFC set to  0.000000
10/1/2011	10:19:05 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:19:05 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:19:05 AM	Tube furnace set to 150
10/1/2011	10:19:06 AM	Run finished at 10:19 AM
10/1/2011	10:19:13 AM	Tube furnace set to 0
10/1/2011	10:20:24 AM	Main Vac valve closed
10/1/2011	10:20:57 AM	Main Vac valve opened
10/1/2011	10:23:14 AM	Recipe started at 10:23 AM
10/1/2011	10:23:14 AM	Helium valve closed
10/1/2011	10:23:14 AM	H2 valve closed
10/1/2011	10:23:14 AM	BCl3 valve closed
10/1/2011	10:23:14 AM	PH3 valve closed
10/1/2011	10:23:14 AM	SiCl4 pre valve closed
10/1/2011	10:23:14 AM	SiCl4 post valve closed
10/1/2011	10:23:14 AM	Main Vac valve closed
10/1/2011	10:23:14 AM	Bypass valve closed
10/1/2011	10:23:14 AM	Bubbler valve closed
10/1/2011	10:23:14 AM	Helium MFC set to  0.000000
10/1/2011	10:23:14 AM	H2 MFC set to  0.000000
10/1/2011	10:23:14 AM	BCl3 MFC set to  0.000000
10/1/2011	10:23:14 AM	PHl3 MFC set to  0.000000
10/1/2011	10:23:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:23:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:23:14 AM	Tube furnace set to 0
10/1/2011	10:23:17 AM	Helium valve closed
10/1/2011	10:23:17 AM	BCl3 valve closed
10/1/2011	10:23:17 AM	PH3 valve closed
10/1/2011	10:23:17 AM	SiCl4 pre valve closed
10/1/2011	10:23:17 AM	SiCl4 post valve closed
10/1/2011	10:23:17 AM	Main Vac valve closed
10/1/2011	10:23:17 AM	Bypass valve closed
10/1/2011	10:23:17 AM	Bubbler valve closed
10/1/2011	10:23:17 AM	H2 valve opened
10/1/2011	10:23:17 AM	Helium MFC set to  0.000000
10/1/2011	10:23:17 AM	H2 MFC set to  500.000000
10/1/2011	10:23:17 AM	BCl3 MFC set to  0.000000
10/1/2011	10:23:17 AM	PHl3 MFC set to  0.000000
10/1/2011	10:23:17 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:23:17 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:23:17 AM	Tube furnace set to 0
10/1/2011	10:24:22 AM	Helium valve closed
10/1/2011	10:24:22 AM	BCl3 valve closed
10/1/2011	10:24:22 AM	PH3 valve closed
10/1/2011	10:24:22 AM	SiCl4 pre valve closed
10/1/2011	10:24:22 AM	SiCl4 post valve closed
10/1/2011	10:24:22 AM	Main Vac valve closed
10/1/2011	10:24:22 AM	Bypass valve closed
10/1/2011	10:24:22 AM	H2 valve opened
10/1/2011	10:24:22 AM	Bubbler valve opened
10/1/2011	10:24:22 AM	Helium MFC set to  0.000000
10/1/2011	10:24:22 AM	H2 MFC set to  500.000000
10/1/2011	10:24:22 AM	BCl3 MFC set to  0.000000
10/1/2011	10:24:22 AM	PHl3 MFC set to  0.000000
10/1/2011	10:24:22 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:24:22 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:24:22 AM	Tube furnace set to 0
10/1/2011	10:24:23 AM	Helium valve closed
10/1/2011	10:24:23 AM	BCl3 valve closed
10/1/2011	10:24:23 AM	PH3 valve closed
10/1/2011	10:24:23 AM	SiCl4 pre valve closed
10/1/2011	10:24:23 AM	SiCl4 post valve closed
10/1/2011	10:24:23 AM	Main Vac valve closed
10/1/2011	10:24:23 AM	Bypass valve closed
10/1/2011	10:24:23 AM	H2 valve opened
10/1/2011	10:24:23 AM	Bubbler valve opened
10/1/2011	10:24:23 AM	Helium MFC set to  0.000000
10/1/2011	10:24:23 AM	H2 MFC set to  500.000000
10/1/2011	10:24:23 AM	BCl3 MFC set to  0.000000
10/1/2011	10:24:23 AM	PHl3 MFC set to  0.000000
10/1/2011	10:24:23 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:24:23 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:24:23 AM	Tube furnace set to 1000
10/1/2011	10:44:23 AM	Helium valve closed
10/1/2011	10:44:23 AM	PH3 valve closed
10/1/2011	10:44:23 AM	Main Vac valve closed
10/1/2011	10:44:23 AM	Bypass valve closed
10/1/2011	10:44:23 AM	H2 valve opened
10/1/2011	10:44:23 AM	BCl3 valve opened
10/1/2011	10:44:23 AM	SiCl4 pre valve opened
10/1/2011	10:44:23 AM	SiCl4 post valve opened
10/1/2011	10:44:23 AM	Bubbler valve opened
10/1/2011	10:44:23 AM	Helium MFC set to  0.000000
10/1/2011	10:44:23 AM	H2 MFC set to  500.000000
10/1/2011	10:44:23 AM	BCl3 MFC set to  2.500000
10/1/2011	10:44:23 AM	PHl3 MFC set to  0.000000
10/1/2011	10:44:23 AM	SiCl4 MFC set to  50.000000
10/1/2011	10:44:23 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:44:23 AM	Tube furnace set to 1000
10/1/2011	10:49:23 AM	Helium valve closed
10/1/2011	10:49:23 AM	BCl3 valve closed
10/1/2011	10:49:23 AM	PH3 valve closed
10/1/2011	10:49:23 AM	SiCl4 pre valve closed
10/1/2011	10:49:23 AM	SiCl4 post valve closed
10/1/2011	10:49:23 AM	Main Vac valve closed
10/1/2011	10:49:23 AM	Bypass valve closed
10/1/2011	10:49:23 AM	H2 valve opened
10/1/2011	10:49:23 AM	Bubbler valve opened
10/1/2011	10:49:23 AM	Helium MFC set to  0.000000
10/1/2011	10:49:23 AM	H2 MFC set to  500.000000
10/1/2011	10:49:23 AM	BCl3 MFC set to  0.000000
10/1/2011	10:49:23 AM	PHl3 MFC set to  0.000000
10/1/2011	10:49:23 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:49:23 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:49:24 AM	Tube furnace set to 750
10/1/2011	10:54:24 AM	H2 valve closed
10/1/2011	10:54:24 AM	BCl3 valve closed
10/1/2011	10:54:24 AM	PH3 valve closed
10/1/2011	10:54:24 AM	SiCl4 pre valve closed
10/1/2011	10:54:24 AM	SiCl4 post valve closed
10/1/2011	10:54:24 AM	Main Vac valve closed
10/1/2011	10:54:24 AM	Bypass valve closed
10/1/2011	10:54:24 AM	Helium valve opened
10/1/2011	10:54:24 AM	Bubbler valve opened
10/1/2011	10:54:24 AM	Helium MFC set to  500.000000
10/1/2011	10:54:24 AM	H2 MFC set to  0.000000
10/1/2011	10:54:24 AM	BCl3 MFC set to  0.000000
10/1/2011	10:54:24 AM	PHl3 MFC set to  0.000000
10/1/2011	10:54:24 AM	SiCl4 MFC set to  0.000000
10/1/2011	10:54:24 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	10:54:24 AM	Tube furnace set to 0
10/1/2011	11:14:23 AM	Helium valve closed
10/1/2011	11:14:23 AM	H2 valve closed
10/1/2011	11:14:23 AM	BCl3 valve closed
10/1/2011	11:14:23 AM	PH3 valve closed
10/1/2011	11:14:23 AM	SiCl4 pre valve closed
10/1/2011	11:14:23 AM	SiCl4 post valve closed
10/1/2011	11:14:23 AM	Main Vac valve closed
10/1/2011	11:14:23 AM	Bypass valve closed
10/1/2011	11:14:23 AM	Bubbler valve closed
10/1/2011	11:14:23 AM	Helium MFC set to  0.000000
10/1/2011	11:14:23 AM	H2 MFC set to  0.000000
10/1/2011	11:14:23 AM	BCl3 MFC set to  0.000000
10/1/2011	11:14:23 AM	PHl3 MFC set to  0.000000
10/1/2011	11:14:23 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:14:23 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:14:23 AM	Tube furnace set to 0
10/1/2011	11:14:24 AM	Run finished at 11:14 AM
10/1/2011	11:18:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	11:18:35 AM	Recipe started at 11:18 AM
10/1/2011	11:18:35 AM	Helium valve closed
10/1/2011	11:18:35 AM	H2 valve closed
10/1/2011	11:18:35 AM	BCl3 valve closed
10/1/2011	11:18:35 AM	PH3 valve closed
10/1/2011	11:18:35 AM	SiCl4 pre valve closed
10/1/2011	11:18:35 AM	SiCl4 post valve closed
10/1/2011	11:18:35 AM	Main Vac valve closed
10/1/2011	11:18:35 AM	Bubbler valve closed
10/1/2011	11:18:35 AM	Bypass valve opened
10/1/2011	11:18:35 AM	Helium MFC set to  0.000000
10/1/2011	11:18:35 AM	H2 MFC set to  0.000000
10/1/2011	11:18:35 AM	BCl3 MFC set to  0.000000
10/1/2011	11:18:35 AM	PHl3 MFC set to  0.000000
10/1/2011	11:18:35 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:18:35 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:18:35 AM	Tube furnace set to 0
10/1/2011	11:19:44 AM	Helium valve closed
10/1/2011	11:19:44 AM	H2 valve closed
10/1/2011	11:19:44 AM	BCl3 valve closed
10/1/2011	11:19:44 AM	PH3 valve closed
10/1/2011	11:19:44 AM	SiCl4 pre valve closed
10/1/2011	11:19:44 AM	SiCl4 post valve closed
10/1/2011	11:19:44 AM	Main Vac valve closed
10/1/2011	11:19:44 AM	Bubbler valve closed
10/1/2011	11:19:44 AM	Bypass valve opened
10/1/2011	11:19:44 AM	Helium MFC set to  0.000000
10/1/2011	11:19:44 AM	H2 MFC set to  0.000000
10/1/2011	11:19:44 AM	BCl3 MFC set to  0.000000
10/1/2011	11:19:44 AM	PHl3 MFC set to  0.000000
10/1/2011	11:19:44 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:19:44 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:19:44 AM	Tube furnace set to 0
10/1/2011	11:19:51 AM	Helium valve closed
10/1/2011	11:19:51 AM	H2 valve closed
10/1/2011	11:19:51 AM	BCl3 valve closed
10/1/2011	11:19:51 AM	PH3 valve closed
10/1/2011	11:19:51 AM	SiCl4 pre valve closed
10/1/2011	11:19:51 AM	SiCl4 post valve closed
10/1/2011	11:19:51 AM	Bypass valve closed
10/1/2011	11:19:51 AM	Bubbler valve closed
10/1/2011	11:19:51 AM	Main Vac valve opened
10/1/2011	11:19:51 AM	Helium MFC set to  0.000000
10/1/2011	11:19:51 AM	H2 MFC set to  0.000000
10/1/2011	11:19:51 AM	BCl3 MFC set to  0.000000
10/1/2011	11:19:51 AM	PHl3 MFC set to  0.000000
10/1/2011	11:19:51 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:19:51 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:19:51 AM	Tube furnace set to 0
10/1/2011	11:19:52 AM	Run finished at 11:19 AM
10/1/2011	11:19:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	11:21:42 AM	Recipe started at 11:21 AM
10/1/2011	11:21:42 AM	Helium valve closed
10/1/2011	11:21:42 AM	H2 valve closed
10/1/2011	11:21:42 AM	BCl3 valve closed
10/1/2011	11:21:42 AM	PH3 valve closed
10/1/2011	11:21:42 AM	SiCl4 pre valve closed
10/1/2011	11:21:42 AM	SiCl4 post valve closed
10/1/2011	11:21:42 AM	Bypass valve closed
10/1/2011	11:21:42 AM	Bubbler valve closed
10/1/2011	11:21:42 AM	Main Vac valve opened
10/1/2011	11:21:42 AM	Helium MFC set to  0.000000
10/1/2011	11:21:42 AM	H2 MFC set to  0.000000
10/1/2011	11:21:42 AM	BCl3 MFC set to  0.000000
10/1/2011	11:21:42 AM	PHl3 MFC set to  0.000000
10/1/2011	11:21:42 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:21:42 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:21:42 AM	Tube furnace set to 150
10/1/2011	11:22:12 AM	H2 valve closed
10/1/2011	11:22:12 AM	BCl3 valve closed
10/1/2011	11:22:12 AM	PH3 valve closed
10/1/2011	11:22:12 AM	SiCl4 pre valve closed
10/1/2011	11:22:12 AM	SiCl4 post valve closed
10/1/2011	11:22:12 AM	Bypass valve closed
10/1/2011	11:22:12 AM	Bubbler valve closed
10/1/2011	11:22:12 AM	Helium valve opened
10/1/2011	11:22:12 AM	Main Vac valve opened
10/1/2011	11:22:12 AM	Helium MFC set to  20.000000
10/1/2011	11:22:12 AM	H2 MFC set to  0.000000
10/1/2011	11:22:12 AM	BCl3 MFC set to  0.000000
10/1/2011	11:22:12 AM	PHl3 MFC set to  0.000000
10/1/2011	11:22:12 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:22:12 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:22:12 AM	Tube furnace set to 150
10/1/2011	11:22:42 AM	Helium valve closed
10/1/2011	11:22:42 AM	H2 valve closed
10/1/2011	11:22:42 AM	BCl3 valve closed
10/1/2011	11:22:42 AM	PH3 valve closed
10/1/2011	11:22:42 AM	SiCl4 pre valve closed
10/1/2011	11:22:42 AM	SiCl4 post valve closed
10/1/2011	11:22:42 AM	Bypass valve closed
10/1/2011	11:22:42 AM	Bubbler valve closed
10/1/2011	11:22:42 AM	Main Vac valve opened
10/1/2011	11:22:42 AM	Helium MFC set to  0.000000
10/1/2011	11:22:42 AM	H2 MFC set to  0.000000
10/1/2011	11:22:42 AM	BCl3 MFC set to  0.000000
10/1/2011	11:22:42 AM	PHl3 MFC set to  0.000000
10/1/2011	11:22:42 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:22:42 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:22:42 AM	Tube furnace set to 150
10/1/2011	11:23:12 AM	H2 valve closed
10/1/2011	11:23:12 AM	BCl3 valve closed
10/1/2011	11:23:12 AM	PH3 valve closed
10/1/2011	11:23:12 AM	SiCl4 pre valve closed
10/1/2011	11:23:12 AM	SiCl4 post valve closed
10/1/2011	11:23:12 AM	Bypass valve closed
10/1/2011	11:23:12 AM	Bubbler valve closed
10/1/2011	11:23:12 AM	Helium valve opened
10/1/2011	11:23:12 AM	Main Vac valve opened
10/1/2011	11:23:12 AM	Helium MFC set to  20.000000
10/1/2011	11:23:12 AM	H2 MFC set to  0.000000
10/1/2011	11:23:12 AM	BCl3 MFC set to  0.000000
10/1/2011	11:23:12 AM	PHl3 MFC set to  0.000000
10/1/2011	11:23:12 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:23:12 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:23:13 AM	Tube furnace set to 150
10/1/2011	11:23:43 AM	Helium valve closed
10/1/2011	11:23:43 AM	H2 valve closed
10/1/2011	11:23:43 AM	BCl3 valve closed
10/1/2011	11:23:43 AM	PH3 valve closed
10/1/2011	11:23:43 AM	SiCl4 pre valve closed
10/1/2011	11:23:43 AM	SiCl4 post valve closed
10/1/2011	11:23:43 AM	Bypass valve closed
10/1/2011	11:23:43 AM	Bubbler valve closed
10/1/2011	11:23:43 AM	Main Vac valve opened
10/1/2011	11:23:43 AM	Helium MFC set to  0.000000
10/1/2011	11:23:43 AM	H2 MFC set to  0.000000
10/1/2011	11:23:43 AM	BCl3 MFC set to  0.000000
10/1/2011	11:23:43 AM	PHl3 MFC set to  0.000000
10/1/2011	11:23:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:23:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:23:43 AM	Tube furnace set to 150
10/1/2011	11:24:13 AM	H2 valve closed
10/1/2011	11:24:13 AM	BCl3 valve closed
10/1/2011	11:24:13 AM	PH3 valve closed
10/1/2011	11:24:13 AM	SiCl4 pre valve closed
10/1/2011	11:24:13 AM	SiCl4 post valve closed
10/1/2011	11:24:13 AM	Bypass valve closed
10/1/2011	11:24:13 AM	Bubbler valve closed
10/1/2011	11:24:13 AM	Helium valve opened
10/1/2011	11:24:13 AM	Main Vac valve opened
10/1/2011	11:24:13 AM	Helium MFC set to  20.000000
10/1/2011	11:24:13 AM	H2 MFC set to  0.000000
10/1/2011	11:24:13 AM	BCl3 MFC set to  0.000000
10/1/2011	11:24:13 AM	PHl3 MFC set to  0.000000
10/1/2011	11:24:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:24:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:24:13 AM	Tube furnace set to 150
10/1/2011	11:24:43 AM	Helium valve closed
10/1/2011	11:24:43 AM	H2 valve closed
10/1/2011	11:24:43 AM	BCl3 valve closed
10/1/2011	11:24:43 AM	PH3 valve closed
10/1/2011	11:24:43 AM	SiCl4 pre valve closed
10/1/2011	11:24:43 AM	SiCl4 post valve closed
10/1/2011	11:24:43 AM	Bypass valve closed
10/1/2011	11:24:43 AM	Bubbler valve closed
10/1/2011	11:24:43 AM	Main Vac valve opened
10/1/2011	11:24:43 AM	Helium MFC set to  0.000000
10/1/2011	11:24:43 AM	H2 MFC set to  0.000000
10/1/2011	11:24:43 AM	BCl3 MFC set to  0.000000
10/1/2011	11:24:43 AM	PHl3 MFC set to  0.000000
10/1/2011	11:24:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:24:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:24:43 AM	Tube furnace set to 150
10/1/2011	11:25:13 AM	H2 valve closed
10/1/2011	11:25:13 AM	BCl3 valve closed
10/1/2011	11:25:13 AM	PH3 valve closed
10/1/2011	11:25:13 AM	SiCl4 pre valve closed
10/1/2011	11:25:13 AM	SiCl4 post valve closed
10/1/2011	11:25:13 AM	Bypass valve closed
10/1/2011	11:25:13 AM	Bubbler valve closed
10/1/2011	11:25:13 AM	Helium valve opened
10/1/2011	11:25:13 AM	Main Vac valve opened
10/1/2011	11:25:13 AM	Helium MFC set to  20.000000
10/1/2011	11:25:13 AM	H2 MFC set to  0.000000
10/1/2011	11:25:13 AM	BCl3 MFC set to  0.000000
10/1/2011	11:25:13 AM	PHl3 MFC set to  0.000000
10/1/2011	11:25:13 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:25:13 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:25:13 AM	Tube furnace set to 150
10/1/2011	11:25:43 AM	Helium valve closed
10/1/2011	11:25:43 AM	H2 valve closed
10/1/2011	11:25:43 AM	BCl3 valve closed
10/1/2011	11:25:43 AM	PH3 valve closed
10/1/2011	11:25:43 AM	SiCl4 pre valve closed
10/1/2011	11:25:43 AM	SiCl4 post valve closed
10/1/2011	11:25:43 AM	Bypass valve closed
10/1/2011	11:25:43 AM	Bubbler valve closed
10/1/2011	11:25:43 AM	Main Vac valve opened
10/1/2011	11:25:43 AM	Helium MFC set to  0.000000
10/1/2011	11:25:43 AM	H2 MFC set to  0.000000
10/1/2011	11:25:43 AM	BCl3 MFC set to  0.000000
10/1/2011	11:25:43 AM	PHl3 MFC set to  0.000000
10/1/2011	11:25:43 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:25:43 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:25:44 AM	Tube furnace set to 150
10/1/2011	11:26:14 AM	H2 valve closed
10/1/2011	11:26:14 AM	BCl3 valve closed
10/1/2011	11:26:14 AM	PH3 valve closed
10/1/2011	11:26:14 AM	SiCl4 pre valve closed
10/1/2011	11:26:14 AM	SiCl4 post valve closed
10/1/2011	11:26:14 AM	Bypass valve closed
10/1/2011	11:26:14 AM	Bubbler valve closed
10/1/2011	11:26:14 AM	Helium valve opened
10/1/2011	11:26:14 AM	Main Vac valve opened
10/1/2011	11:26:14 AM	Helium MFC set to  20.000000
10/1/2011	11:26:14 AM	H2 MFC set to  0.000000
10/1/2011	11:26:14 AM	BCl3 MFC set to  0.000000
10/1/2011	11:26:14 AM	PHl3 MFC set to  0.000000
10/1/2011	11:26:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:26:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:26:14 AM	Tube furnace set to 150
10/1/2011	11:26:44 AM	Helium valve closed
10/1/2011	11:26:44 AM	H2 valve closed
10/1/2011	11:26:44 AM	BCl3 valve closed
10/1/2011	11:26:44 AM	PH3 valve closed
10/1/2011	11:26:44 AM	SiCl4 pre valve closed
10/1/2011	11:26:44 AM	SiCl4 post valve closed
10/1/2011	11:26:44 AM	Bypass valve closed
10/1/2011	11:26:44 AM	Bubbler valve closed
10/1/2011	11:26:44 AM	Main Vac valve opened
10/1/2011	11:26:44 AM	Helium MFC set to  0.000000
10/1/2011	11:26:44 AM	H2 MFC set to  0.000000
10/1/2011	11:26:44 AM	BCl3 MFC set to  0.000000
10/1/2011	11:26:44 AM	PHl3 MFC set to  0.000000
10/1/2011	11:26:44 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:26:44 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:26:44 AM	Tube furnace set to 150
10/1/2011	11:27:14 AM	H2 valve closed
10/1/2011	11:27:14 AM	BCl3 valve closed
10/1/2011	11:27:14 AM	PH3 valve closed
10/1/2011	11:27:14 AM	SiCl4 pre valve closed
10/1/2011	11:27:14 AM	SiCl4 post valve closed
10/1/2011	11:27:14 AM	Bypass valve closed
10/1/2011	11:27:14 AM	Bubbler valve closed
10/1/2011	11:27:14 AM	Helium valve opened
10/1/2011	11:27:14 AM	Main Vac valve opened
10/1/2011	11:27:14 AM	Helium MFC set to  20.000000
10/1/2011	11:27:14 AM	H2 MFC set to  0.000000
10/1/2011	11:27:14 AM	BCl3 MFC set to  0.000000
10/1/2011	11:27:14 AM	PHl3 MFC set to  0.000000
10/1/2011	11:27:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:27:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:27:14 AM	Tube furnace set to 150
10/1/2011	11:27:44 AM	Helium valve closed
10/1/2011	11:27:44 AM	H2 valve closed
10/1/2011	11:27:44 AM	BCl3 valve closed
10/1/2011	11:27:44 AM	PH3 valve closed
10/1/2011	11:27:44 AM	SiCl4 pre valve closed
10/1/2011	11:27:44 AM	SiCl4 post valve closed
10/1/2011	11:27:44 AM	Bypass valve closed
10/1/2011	11:27:44 AM	Bubbler valve closed
10/1/2011	11:27:44 AM	Main Vac valve opened
10/1/2011	11:27:44 AM	Helium MFC set to  0.000000
10/1/2011	11:27:44 AM	H2 MFC set to  0.000000
10/1/2011	11:27:44 AM	BCl3 MFC set to  0.000000
10/1/2011	11:27:44 AM	PHl3 MFC set to  0.000000
10/1/2011	11:27:44 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:27:44 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:27:44 AM	Tube furnace set to 150
10/1/2011	11:28:14 AM	H2 valve closed
10/1/2011	11:28:14 AM	BCl3 valve closed
10/1/2011	11:28:14 AM	PH3 valve closed
10/1/2011	11:28:14 AM	SiCl4 pre valve closed
10/1/2011	11:28:14 AM	SiCl4 post valve closed
10/1/2011	11:28:14 AM	Bypass valve closed
10/1/2011	11:28:14 AM	Bubbler valve closed
10/1/2011	11:28:14 AM	Helium valve opened
10/1/2011	11:28:14 AM	Main Vac valve opened
10/1/2011	11:28:14 AM	Helium MFC set to  20.000000
10/1/2011	11:28:14 AM	H2 MFC set to  0.000000
10/1/2011	11:28:14 AM	BCl3 MFC set to  0.000000
10/1/2011	11:28:14 AM	PHl3 MFC set to  0.000000
10/1/2011	11:28:14 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:28:14 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:28:15 AM	Tube furnace set to 150
10/1/2011	11:28:45 AM	Helium valve closed
10/1/2011	11:28:45 AM	H2 valve closed
10/1/2011	11:28:45 AM	BCl3 valve closed
10/1/2011	11:28:45 AM	PH3 valve closed
10/1/2011	11:28:45 AM	SiCl4 pre valve closed
10/1/2011	11:28:45 AM	SiCl4 post valve closed
10/1/2011	11:28:45 AM	Bypass valve closed
10/1/2011	11:28:45 AM	Bubbler valve closed
10/1/2011	11:28:45 AM	Main Vac valve opened
10/1/2011	11:28:45 AM	Helium MFC set to  0.000000
10/1/2011	11:28:45 AM	H2 MFC set to  0.000000
10/1/2011	11:28:45 AM	BCl3 MFC set to  0.000000
10/1/2011	11:28:45 AM	PHl3 MFC set to  0.000000
10/1/2011	11:28:45 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:28:45 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:28:45 AM	Tube furnace set to 150
10/1/2011	11:29:15 AM	H2 valve closed
10/1/2011	11:29:15 AM	BCl3 valve closed
10/1/2011	11:29:15 AM	PH3 valve closed
10/1/2011	11:29:15 AM	SiCl4 pre valve closed
10/1/2011	11:29:15 AM	SiCl4 post valve closed
10/1/2011	11:29:15 AM	Bypass valve closed
10/1/2011	11:29:15 AM	Bubbler valve closed
10/1/2011	11:29:15 AM	Helium valve opened
10/1/2011	11:29:15 AM	Main Vac valve opened
10/1/2011	11:29:15 AM	Helium MFC set to  20.000000
10/1/2011	11:29:15 AM	H2 MFC set to  0.000000
10/1/2011	11:29:15 AM	BCl3 MFC set to  0.000000
10/1/2011	11:29:15 AM	PHl3 MFC set to  0.000000
10/1/2011	11:29:15 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:29:15 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:29:15 AM	Tube furnace set to 150
10/1/2011	11:29:45 AM	Helium valve closed
10/1/2011	11:29:45 AM	H2 valve closed
10/1/2011	11:29:45 AM	BCl3 valve closed
10/1/2011	11:29:45 AM	PH3 valve closed
10/1/2011	11:29:45 AM	SiCl4 pre valve closed
10/1/2011	11:29:45 AM	SiCl4 post valve closed
10/1/2011	11:29:45 AM	Bypass valve closed
10/1/2011	11:29:45 AM	Bubbler valve closed
10/1/2011	11:29:45 AM	Main Vac valve opened
10/1/2011	11:29:45 AM	Helium MFC set to  0.000000
10/1/2011	11:29:45 AM	H2 MFC set to  0.000000
10/1/2011	11:29:45 AM	BCl3 MFC set to  0.000000
10/1/2011	11:29:45 AM	PHl3 MFC set to  0.000000
10/1/2011	11:29:45 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:29:45 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:29:45 AM	Tube furnace set to 150
10/1/2011	11:30:15 AM	H2 valve closed
10/1/2011	11:30:15 AM	BCl3 valve closed
10/1/2011	11:30:15 AM	PH3 valve closed
10/1/2011	11:30:15 AM	SiCl4 pre valve closed
10/1/2011	11:30:15 AM	SiCl4 post valve closed
10/1/2011	11:30:15 AM	Bypass valve closed
10/1/2011	11:30:15 AM	Bubbler valve closed
10/1/2011	11:30:15 AM	Helium valve opened
10/1/2011	11:30:15 AM	Main Vac valve opened
10/1/2011	11:30:15 AM	Helium MFC set to  20.000000
10/1/2011	11:30:15 AM	H2 MFC set to  0.000000
10/1/2011	11:30:15 AM	BCl3 MFC set to  0.000000
10/1/2011	11:30:15 AM	PHl3 MFC set to  0.000000
10/1/2011	11:30:15 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:30:15 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:30:15 AM	Tube furnace set to 150
10/1/2011	11:30:45 AM	Helium valve closed
10/1/2011	11:30:45 AM	H2 valve closed
10/1/2011	11:30:45 AM	BCl3 valve closed
10/1/2011	11:30:45 AM	PH3 valve closed
10/1/2011	11:30:45 AM	SiCl4 pre valve closed
10/1/2011	11:30:45 AM	SiCl4 post valve closed
10/1/2011	11:30:45 AM	Bypass valve closed
10/1/2011	11:30:45 AM	Bubbler valve closed
10/1/2011	11:30:46 AM	Main Vac valve opened
10/1/2011	11:30:46 AM	Helium MFC set to  0.000000
10/1/2011	11:30:46 AM	H2 MFC set to  0.000000
10/1/2011	11:30:46 AM	BCl3 MFC set to  0.000000
10/1/2011	11:30:46 AM	PHl3 MFC set to  0.000000
10/1/2011	11:30:46 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:30:46 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:30:46 AM	Tube furnace set to 150
10/1/2011	11:31:16 AM	H2 valve closed
10/1/2011	11:31:16 AM	BCl3 valve closed
10/1/2011	11:31:16 AM	PH3 valve closed
10/1/2011	11:31:16 AM	SiCl4 pre valve closed
10/1/2011	11:31:16 AM	SiCl4 post valve closed
10/1/2011	11:31:16 AM	Bypass valve closed
10/1/2011	11:31:16 AM	Bubbler valve closed
10/1/2011	11:31:16 AM	Helium valve opened
10/1/2011	11:31:16 AM	Main Vac valve opened
10/1/2011	11:31:16 AM	Helium MFC set to  20.000000
10/1/2011	11:31:16 AM	H2 MFC set to  0.000000
10/1/2011	11:31:16 AM	BCl3 MFC set to  0.000000
10/1/2011	11:31:16 AM	PHl3 MFC set to  0.000000
10/1/2011	11:31:16 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:31:16 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:31:16 AM	Tube furnace set to 150
10/1/2011	11:31:46 AM	Helium valve closed
10/1/2011	11:31:46 AM	H2 valve closed
10/1/2011	11:31:46 AM	BCl3 valve closed
10/1/2011	11:31:46 AM	PH3 valve closed
10/1/2011	11:31:46 AM	SiCl4 pre valve closed
10/1/2011	11:31:46 AM	SiCl4 post valve closed
10/1/2011	11:31:46 AM	Bypass valve closed
10/1/2011	11:31:46 AM	Bubbler valve closed
10/1/2011	11:31:46 AM	Main Vac valve opened
10/1/2011	11:31:46 AM	Helium MFC set to  0.000000
10/1/2011	11:31:46 AM	H2 MFC set to  0.000000
10/1/2011	11:31:46 AM	BCl3 MFC set to  0.000000
10/1/2011	11:31:46 AM	PHl3 MFC set to  0.000000
10/1/2011	11:31:46 AM	SiCl4 MFC set to  0.000000
10/1/2011	11:31:46 AM	Bypass solenoid MFC set to  0.000000
10/1/2011	11:31:46 AM	Tube furnace set to 150
10/1/2011	11:31:47 AM	Run finished at 11:31 AM
10/1/2011	4:52:31 PM	Main Vac valve closed
10/1/2011	4:53:12 PM	Main Vac valve opened
10/1/2011	4:54:41 PM	Main Vac valve closed
10/1/2011	4:55:17 PM	Main Vac valve opened
10/1/2011	4:55:29 PM	Recipe started at 4:55 PM
10/1/2011	4:55:29 PM	Helium valve closed
10/1/2011	4:55:29 PM	H2 valve closed
10/1/2011	4:55:29 PM	PH3 valve closed
10/1/2011	4:55:29 PM	SiCl4 pre valve closed
10/1/2011	4:55:29 PM	SiCl4 post valve closed
10/1/2011	4:55:29 PM	Main Vac valve closed
10/1/2011	4:55:29 PM	Bypass valve closed
10/1/2011	4:55:29 PM	Bubbler valve closed
10/1/2011	4:55:29 PM	BCl3 valve opened
10/1/2011	4:55:29 PM	Helium MFC set to  0.000000
10/1/2011	4:55:29 PM	H2 MFC set to  0.000000
10/1/2011	4:55:29 PM	BCl3 MFC set to  0.000000
10/1/2011	4:55:29 PM	PHl3 MFC set to  0.000000
10/1/2011	4:55:29 PM	SiCl4 MFC set to  0.000000
10/1/2011	4:55:29 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	4:55:29 PM	Tube furnace set to 0
10/1/2011	4:55:32 PM	Helium valve closed
10/1/2011	4:55:32 PM	BCl3 valve closed
10/1/2011	4:55:32 PM	PH3 valve closed
10/1/2011	4:55:32 PM	SiCl4 pre valve closed
10/1/2011	4:55:32 PM	SiCl4 post valve closed
10/1/2011	4:55:32 PM	Main Vac valve closed
10/1/2011	4:55:32 PM	Bypass valve closed
10/1/2011	4:55:32 PM	Bubbler valve closed
10/1/2011	4:55:32 PM	H2 valve opened
10/1/2011	4:55:32 PM	Helium MFC set to  0.000000
10/1/2011	4:55:32 PM	H2 MFC set to  500.000000
10/1/2011	4:55:32 PM	BCl3 MFC set to  0.000000
10/1/2011	4:55:32 PM	PHl3 MFC set to  0.000000
10/1/2011	4:55:32 PM	SiCl4 MFC set to  0.000000
10/1/2011	4:55:32 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	4:55:33 PM	Tube furnace set to 0
10/1/2011	4:56:36 PM	Helium valve closed
10/1/2011	4:56:36 PM	BCl3 valve closed
10/1/2011	4:56:36 PM	PH3 valve closed
10/1/2011	4:56:36 PM	SiCl4 pre valve closed
10/1/2011	4:56:36 PM	SiCl4 post valve closed
10/1/2011	4:56:36 PM	Main Vac valve closed
10/1/2011	4:56:36 PM	Bypass valve closed
10/1/2011	4:56:36 PM	H2 valve opened
10/1/2011	4:56:36 PM	Bubbler valve opened
10/1/2011	4:56:36 PM	Helium MFC set to  0.000000
10/1/2011	4:56:36 PM	H2 MFC set to  500.000000
10/1/2011	4:56:36 PM	BCl3 MFC set to  0.000000
10/1/2011	4:56:36 PM	PHl3 MFC set to  0.000000
10/1/2011	4:56:36 PM	SiCl4 MFC set to  0.000000
10/1/2011	4:56:36 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	4:56:37 PM	Tube furnace set to 0
10/1/2011	4:56:38 PM	Helium valve closed
10/1/2011	4:56:38 PM	BCl3 valve closed
10/1/2011	4:56:38 PM	PH3 valve closed
10/1/2011	4:56:38 PM	SiCl4 pre valve closed
10/1/2011	4:56:38 PM	SiCl4 post valve closed
10/1/2011	4:56:38 PM	Main Vac valve closed
10/1/2011	4:56:38 PM	Bypass valve closed
10/1/2011	4:56:38 PM	H2 valve opened
10/1/2011	4:56:38 PM	Bubbler valve opened
10/1/2011	4:56:38 PM	Helium MFC set to  0.000000
10/1/2011	4:56:38 PM	H2 MFC set to  500.000000
10/1/2011	4:56:38 PM	BCl3 MFC set to  0.000000
10/1/2011	4:56:38 PM	PHl3 MFC set to  0.000000
10/1/2011	4:56:38 PM	SiCl4 MFC set to  0.000000
10/1/2011	4:56:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	4:56:38 PM	Tube furnace set to 1000
10/1/2011	5:16:38 PM	Helium valve closed
10/1/2011	5:16:38 PM	PH3 valve closed
10/1/2011	5:16:38 PM	Main Vac valve closed
10/1/2011	5:16:38 PM	Bypass valve closed
10/1/2011	5:16:38 PM	H2 valve opened
10/1/2011	5:16:38 PM	BCl3 valve opened
10/1/2011	5:16:38 PM	SiCl4 pre valve opened
10/1/2011	5:16:38 PM	SiCl4 post valve opened
10/1/2011	5:16:38 PM	Bubbler valve opened
10/1/2011	5:16:38 PM	Helium MFC set to  0.000000
10/1/2011	5:16:38 PM	H2 MFC set to  500.000000
10/1/2011	5:16:38 PM	BCl3 MFC set to  2.500000
10/1/2011	5:16:38 PM	PHl3 MFC set to  0.000000
10/1/2011	5:16:38 PM	SiCl4 MFC set to  50.000000
10/1/2011	5:16:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	5:16:38 PM	Tube furnace set to 1000
10/1/2011	5:21:38 PM	Helium valve closed
10/1/2011	5:21:38 PM	BCl3 valve closed
10/1/2011	5:21:38 PM	PH3 valve closed
10/1/2011	5:21:38 PM	SiCl4 pre valve closed
10/1/2011	5:21:38 PM	SiCl4 post valve closed
10/1/2011	5:21:38 PM	Main Vac valve closed
10/1/2011	5:21:38 PM	Bypass valve closed
10/1/2011	5:21:38 PM	H2 valve opened
10/1/2011	5:21:38 PM	Bubbler valve opened
10/1/2011	5:21:38 PM	Helium MFC set to  0.000000
10/1/2011	5:21:38 PM	H2 MFC set to  500.000000
10/1/2011	5:21:38 PM	BCl3 MFC set to  0.000000
10/1/2011	5:21:38 PM	PHl3 MFC set to  0.000000
10/1/2011	5:21:38 PM	SiCl4 MFC set to  0.000000
10/1/2011	5:21:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	5:21:38 PM	Tube furnace set to 750
10/1/2011	5:26:38 PM	H2 valve closed
10/1/2011	5:26:38 PM	BCl3 valve closed
10/1/2011	5:26:38 PM	PH3 valve closed
10/1/2011	5:26:38 PM	SiCl4 pre valve closed
10/1/2011	5:26:38 PM	SiCl4 post valve closed
10/1/2011	5:26:38 PM	Main Vac valve closed
10/1/2011	5:26:38 PM	Bypass valve closed
10/1/2011	5:26:38 PM	Helium valve opened
10/1/2011	5:26:38 PM	Bubbler valve opened
10/1/2011	5:26:38 PM	Helium MFC set to  500.000000
10/1/2011	5:26:38 PM	H2 MFC set to  0.000000
10/1/2011	5:26:38 PM	BCl3 MFC set to  0.000000
10/1/2011	5:26:38 PM	PHl3 MFC set to  0.000000
10/1/2011	5:26:38 PM	SiCl4 MFC set to  0.000000
10/1/2011	5:26:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	5:26:38 PM	Tube furnace set to 0
10/1/2011	5:46:38 PM	Helium valve closed
10/1/2011	5:46:38 PM	H2 valve closed
10/1/2011	5:46:38 PM	BCl3 valve closed
10/1/2011	5:46:38 PM	PH3 valve closed
10/1/2011	5:46:38 PM	SiCl4 pre valve closed
10/1/2011	5:46:38 PM	SiCl4 post valve closed
10/1/2011	5:46:38 PM	Main Vac valve closed
10/1/2011	5:46:38 PM	Bypass valve closed
10/1/2011	5:46:38 PM	Bubbler valve closed
10/1/2011	5:46:38 PM	Helium MFC set to  0.000000
10/1/2011	5:46:38 PM	H2 MFC set to  0.000000
10/1/2011	5:46:38 PM	BCl3 MFC set to  0.000000
10/1/2011	5:46:38 PM	PHl3 MFC set to  0.000000
10/1/2011	5:46:38 PM	SiCl4 MFC set to  0.000000
10/1/2011	5:46:38 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	5:46:38 PM	Tube furnace set to 0
10/1/2011	5:46:39 PM	Run finished at 5:46 PM
10/1/2011	6:58:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	6:58:02 PM	Recipe started at 6:58 PM
10/1/2011	6:58:02 PM	Helium valve closed
10/1/2011	6:58:02 PM	H2 valve closed
10/1/2011	6:58:02 PM	BCl3 valve closed
10/1/2011	6:58:02 PM	PH3 valve closed
10/1/2011	6:58:02 PM	SiCl4 pre valve closed
10/1/2011	6:58:02 PM	SiCl4 post valve closed
10/1/2011	6:58:02 PM	Main Vac valve closed
10/1/2011	6:58:02 PM	Bypass valve closed
10/1/2011	6:58:02 PM	Bubbler valve closed
10/1/2011	6:58:02 PM	Helium MFC set to  0.000000
10/1/2011	6:58:02 PM	H2 MFC set to  0.000000
10/1/2011	6:58:02 PM	BCl3 MFC set to  0.000000
10/1/2011	6:58:02 PM	PHl3 MFC set to  0.000000
10/1/2011	6:58:02 PM	SiCl4 MFC set to  0.000000
10/1/2011	6:58:02 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	6:58:02 PM	Tube furnace set to 0
10/1/2011	6:58:05 PM	H2 valve closed
10/1/2011	6:58:05 PM	BCl3 valve closed
10/1/2011	6:58:05 PM	PH3 valve closed
10/1/2011	6:58:05 PM	SiCl4 pre valve closed
10/1/2011	6:58:05 PM	SiCl4 post valve closed
10/1/2011	6:58:05 PM	Main Vac valve closed
10/1/2011	6:58:05 PM	Bypass valve closed
10/1/2011	6:58:05 PM	Bubbler valve closed
10/1/2011	6:58:05 PM	Helium valve opened
10/1/2011	6:58:05 PM	Helium MFC set to  500.000000
10/1/2011	6:58:05 PM	H2 MFC set to  0.000000
10/1/2011	6:58:05 PM	BCl3 MFC set to  0.000000
10/1/2011	6:58:05 PM	PHl3 MFC set to  0.000000
10/1/2011	6:58:05 PM	SiCl4 MFC set to  0.000000
10/1/2011	6:58:05 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	6:58:05 PM	Tube furnace set to 0
10/1/2011	6:58:09 PM	Helium valve closed
10/1/2011	6:58:09 PM	H2 valve closed
10/1/2011	6:58:09 PM	BCl3 valve closed
10/1/2011	6:58:09 PM	PH3 valve closed
10/1/2011	6:58:09 PM	SiCl4 pre valve closed
10/1/2011	6:58:09 PM	SiCl4 post valve closed
10/1/2011	6:58:09 PM	Main Vac valve closed
10/1/2011	6:58:09 PM	Bypass valve closed
10/1/2011	6:58:09 PM	Bubbler valve closed
10/1/2011	6:58:09 PM	Helium MFC set to  0.000000
10/1/2011	6:58:09 PM	H2 MFC set to  0.000000
10/1/2011	6:58:09 PM	BCl3 MFC set to  0.000000
10/1/2011	6:58:09 PM	PHl3 MFC set to  0.000000
10/1/2011	6:58:09 PM	SiCl4 MFC set to  0.000000
10/1/2011	6:58:09 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	6:58:09 PM	Tube furnace set to 0
10/1/2011	6:58:10 PM	Run finished at 6:58 PM
10/1/2011	6:58:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/1/2011	7:01:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/1/2011	7:01:27 PM	Recipe started at 7:01 PM
10/1/2011	7:01:27 PM	Helium valve closed
10/1/2011	7:01:27 PM	H2 valve closed
10/1/2011	7:01:27 PM	BCl3 valve closed
10/1/2011	7:01:27 PM	PH3 valve closed
10/1/2011	7:01:27 PM	SiCl4 pre valve closed
10/1/2011	7:01:27 PM	SiCl4 post valve closed
10/1/2011	7:01:27 PM	Main Vac valve closed
10/1/2011	7:01:27 PM	Bubbler valve closed
10/1/2011	7:01:27 PM	Bypass valve opened
10/1/2011	7:01:27 PM	Helium MFC set to  0.000000
10/1/2011	7:01:27 PM	H2 MFC set to  0.000000
10/1/2011	7:01:27 PM	BCl3 MFC set to  0.000000
10/1/2011	7:01:27 PM	PHl3 MFC set to  0.000000
10/1/2011	7:01:27 PM	SiCl4 MFC set to  0.000000
10/1/2011	7:01:27 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	7:01:27 PM	Tube furnace set to 0
10/1/2011	7:02:34 PM	Helium valve closed
10/1/2011	7:02:34 PM	H2 valve closed
10/1/2011	7:02:34 PM	BCl3 valve closed
10/1/2011	7:02:34 PM	PH3 valve closed
10/1/2011	7:02:34 PM	SiCl4 pre valve closed
10/1/2011	7:02:34 PM	SiCl4 post valve closed
10/1/2011	7:02:34 PM	Main Vac valve closed
10/1/2011	7:02:34 PM	Bubbler valve closed
10/1/2011	7:02:34 PM	Bypass valve opened
10/1/2011	7:02:34 PM	Helium MFC set to  0.000000
10/1/2011	7:02:34 PM	H2 MFC set to  0.000000
10/1/2011	7:02:34 PM	BCl3 MFC set to  0.000000
10/1/2011	7:02:34 PM	PHl3 MFC set to  0.000000
10/1/2011	7:02:34 PM	SiCl4 MFC set to  0.000000
10/1/2011	7:02:34 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	7:02:34 PM	Tube furnace set to 0
10/1/2011	7:03:34 PM	Helium valve closed
10/1/2011	7:03:34 PM	H2 valve closed
10/1/2011	7:03:34 PM	BCl3 valve closed
10/1/2011	7:03:34 PM	PH3 valve closed
10/1/2011	7:03:34 PM	SiCl4 pre valve closed
10/1/2011	7:03:34 PM	SiCl4 post valve closed
10/1/2011	7:03:34 PM	Bypass valve closed
10/1/2011	7:03:34 PM	Bubbler valve closed
10/1/2011	7:03:34 PM	Main Vac valve opened
10/1/2011	7:03:34 PM	Helium MFC set to  0.000000
10/1/2011	7:03:34 PM	H2 MFC set to  0.000000
10/1/2011	7:03:34 PM	BCl3 MFC set to  0.000000
10/1/2011	7:03:34 PM	PHl3 MFC set to  0.000000
10/1/2011	7:03:34 PM	SiCl4 MFC set to  0.000000
10/1/2011	7:03:34 PM	Bypass solenoid MFC set to  0.000000
10/1/2011	7:03:34 PM	Tube furnace set to 0
10/1/2011	7:03:35 PM	Run finished at 7:03 PM
10/1/2011	7:03:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
